Method and apparatus for calibrating a laser wavelength control mechanism
AssigneeCymer Laser Technologies
InventorIgor Fomenkov
Life of this patent
Estimating the term…
Abstract
Calibration of a wavelength adjustment mechanism of a laser is achieved using a hollow cathode absorption lamp. The lamp is provided with a vaporous material having a precisely known wavelength of maximum absorption. A photo-detector detects the amount of light from the laser beam absorbed by the vaporous material as a function of wavelength. The wavelength of the laser is adjusted to achieve maximum absorption such that the actual laser beam wavelength may be compared with an expected, wavelength to determine a calibration offset. The hollow cathode lamp is operated to produce a vaporous material of known absorption characteristic but is illuminated at a level substantially below a level required for conventional opto-galvanic resonance.
Claims33
An apparatus for determining an actual wavelength of a laser being generated by a laser, wherein the laser beam has an adjustable wavelength, said apparatus comprising:
- a hollow cathode lamp positioned in a path of a portion of the laser beam output from the laser, said lamp having a chamber filled with a vaporous material having a known wavelength of maximum absorption, said laser beam illuminating a portion of said vaporous material, with a portion of said laser beam being absorbed by said vaporous material, wherein said lamp includes an anode and a cathode positioned within said chamber with said vaporous material being formed by applying a current to said anode and cathode of an amount sufficient to vaporize a portion of material forming said cathode;
- a photodetector for detecting an amount of absorption of said laser beam by said vaporous material;
- and
- means for determining the actual wavelength of the laser beam from a comparison of the detected amount of absorption and the known wavelength of maximum absorption.
An apparatus for measuring the wavelength of a laser beam output from a laser, said apparatus comprising:
- a hollow cathode lamp positioned in a path of the laser beam output from the laser, said lamp having a chamber filled with a vaporous material having a known absorption characteristic, said laser beam illuminating a portion of said vaporous material, with a portion of said laser beam being absorbed by said vaporous material, wherein said laser beam interacts with said vaporous material, said laser beam having an intensity substantially below an intensity sufficient to cause opto-galvanic resonance with said vaporous material;
- a photodetector for detecting an amount of absorption of said laser beam by said vaporous material;
- and
- means for determining the actual wavelength of said laser beam from a comparison of an amount of absorption of said laser beam and the known absorption characteristic of said material.
An apparatus for calibrating a laser, wherein said laser outputs a laser beam, said apparatus having a wavelength adjustment mechanism which adjusts the wavelength of the laser to correspond to an input wavelength value, with the resulting actual wavelength of the laser possibly differing from the input wavelength value, said apparatus comprising:
- a hollow cathode lamp positioned in a path of the laser beam output from the laser, said lamp having a chamber filled with a vaporous material having a known wavelength of maximum absorption, said laser beam illuminating a portion of said vaporous material, with a portion of said laser beam being absorbed by said vaporous material, wherein said laser beam interacts with said vaporous material, said laser beam having an intensity substantially below an intensity sufficient to cause opto-galvanic resonance with said vaporous material;
- a photo-detector positioned along said beam beyond said lamp, said photo-detector detecting an amount of absorption of said laser beam by said vaporous material;
- a feedback mechanism operable to adjust the wavelength of said laser beam to achieve a maximum amount of absorption of said beam;
- and
- a calibration mechanism operable to calibrate the wavelength adjustment mechanism of the laser based on a comparison of the known wavelength of maximum absorption and an input wavelength value at the wavelength of maximum absorption.
A method for determining an actual wavelength of a laser beam generated by a laser, wherein the laser outputs a laser beam having an adjustable wavelength, said method comprising the steps of:
- passing the laser beam through a cathode lamp, said lamp having a chamber filled with a vaporous material having a known wavelength of maximum absorption, said laser beam illuminating a portion of said vaporous material, with a portion of said laser beam being absorbed by said vaporous material, wherein said lamp includes an anode and a cathode positioned within said chamber with said vaporous material being formed by applying a current to said anode and cathode of an amount sufficient to vaporize a portion of material forming said cathode;
- detecting an amount of absorption of said laser beam by said vaporous material by means of a photodetector;
- adjusting the wavelength of the laser to achieve an amount of maximum absorption;
- and
- determining the actual wavelength of the laser based on the known wavelength of maximum absorption.
In a method for determining an actual wavelength of a laser beam by passing the laser beam through an hollow cathode lamp having a vaporous material selected to achieve opto-galvanic resonance with the laser beam, an improvement comprising:
- determining the wavelength of maximum absorption of the laser beam by comparing the actual wavelength at maximum absorption to a wavelength indicated by a wavelength measurement system coinciding with maximum absorption;
- driving the lamp at a level below a level sufficient to cause opto-galvanic resonance with the laser beam;
- detecting an amount of absorption of the laser beam by the vaporous material by means of a photodetector, wherein the vaporous material has a known wavelength of maximum absorption;
- and
- determining the actual wavelength of the laser based on the known wavelength of maximum absorption.
An apparatus for determining an actual wavelength of a laser being generated by a laser, wherein the laser beam has an adjustable wavelength, said apparatus comprising:
- a hollow cathode lamp positioned in a path of a portion of the laser beam output from the laser, said lamp having a chamber filled with a vaporous material having a known wavelength of maximum absorption, said laser beam illuminating a portion of said vaporous material, with a portion of said laser beam being absorbed by said vaporous material;
- a photodetector for detecting an amount of absorption of said laser beam by said vaporous material;
- a wavelength measurement system which adjusts the wavelength of the laser to a target wavelength and wherein means are provided for calibrating the wavelength measurement system based on a comparison of the actual wavelength at maximum absorption to a wavelength indicated by the wavelength measurement system coinciding with maximum absorption;
- and
- means for determining the actual wavelength of the laser beam from a comparison of the detected amount of absorption and the known wavelength of maximum absorption.
Dependencies are inferred from the claim text.