Computer-controlled individual chip management system for processing wafers
AssigneeSony Corporation
InventorTakefumi Oshima
Life of this patent
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AssigneeSony Corporation
InventorTakefumi Oshima
Estimating the term…
Chips formed on respective wafers are numbered. A map in which chip positions are correlated with chip numbers is created. A process is specified for each individual chip. A host computer creates processing information from inputted lot information for each individual chip and supplies the created processing information to a processing apparatus. A terminal for receiving various kinds of information, a line terminal, a processing information storage means for storing processing information, and a line interior information storage means are connected to the host computer. Also, a chip-managing computer is connected to the host computer. This chip-managing computer creates maps of chips formed on wafers and creates map information in which device information is correlated with chip numbers assigned to respective chips. A chip information storage means for storing the map information is connected to the chip-managing computer.
A chip-managing system for managing production of wafers on each of which a plurality of chips requiring different kinds of processing information are mounted, said chip-managing system comprising:
Dependencies are inferred from the claim text.