Multiprocessing apparatus

A wafer vacuum processing apparatus, comprising:

• a carrier processor for carrying a wafer under a vacuum;
• a plurality of wafer process processors connected to said carrier processor for processing said wafer under the vacuum, respectively;
• a plurality of process controllers for respectively controlling said wafer process processors,
• wherein each of said process controllers includes means for generating a connection information signal for expressing that each of said wafer process processors is directly connected to said carrier processor respectively;
• and
• a carrier controller for controlling said carrier processor and said process controllers,
• wherein said carrier controller includes:
• switching means for generating a registration information signal expressing registration of connection of said wafer process processor to said carrier processor,
• control means for carrying out a control process while logically judging a matching state between the respective wafer process processors and the registered wafer process processor by referencing the connection information signal and the registration information signal, and
• display means for displaying guidance based on the matching state due to said control means.