Scanning electron microscope

A scanning electron microscope including means for holding a sample, means for applying a probe beam to said sample, means for condensing said probe beam, and an electron optical system for collecting secondary electrons emitted from said sample by application of said probe beam to said sample and for introducing said secondary electrons into means for detecting a spin polarization of said secondary electrons,

• wherein one or both of a head portion of said electron optical system and a peripheral portion of said sample is/are made of a material having high magnetic permeability, and a portion for passing said probe beam therethrough is provided in the head portion of said electron optical system.

A scanning electron microscope including means for holding a sample, means for applying a probe beam to said sample, means for condensing said probe beam, and an electron optical system for collecting secondary electrons emitted from said sample by application of said probe beam to said sample and for introducing said secondary electrons into means for detecting a spin polarization of said secondary electrons,

• wherein said means for condensing said probe beam is an electromagnetic lens, and both said means for holding said sample and a head portion of said electron optical system are arranged within a spheroidal magnetic shield which is provided in one end of said electromagnetic lens through a non-magnetic spacer.

A scanning electron microscope including means for holding a sample, means for applying a probe beam to said sample, means for condensing said probe beam, and means for analyzing electrons emitted from said sample by application of said probe beam to said sample,

• wherein one or both of a head portion of said means for analyzing said electrons and a peripheral portion of said sample is/are made of a material having high magnetic permeability, and a portion for passing said probe beam therethrough is provided in said head portion of said means for analyzing said electrons.

A scanning electron microscope including means for holding a sample, means for applying a probe beam to said sample, means for condensing said probe beam, and means for analyzing Auger electrons emitted from said sample by application of said probe beam to said sample,

• wherein said means for condensing said probe beam is an electromagnetic lens, and both said means for holding said sample and means for collecting said Auger electrons and for detecting the physical quantities of said Auger electrons are arranged within a spheroidal magnetic shield which is provided in one end of said electromagnetic lens through a non-magnetic spacer.