Low-gas temperature stabilization system
AssigneeBrooks Automation, Inc.
InventorRichard S. Muka
Life of this patent
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Abstract
The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article by a small gap, to a pressure just sufficient to provide viscous gas behavior, adjusting the temperature of the article to closely match that of the member by gas conduction heat transfer across the gap, and evacuating the chamber to high vacuum.
Claims7
That method of stabilizing the temperature of an object spaced from a controlled-temperature member by a small gap in a vacuum region before evacuation thereof to the desired vacuum and while the region is at a pressure which is greater than ten times the pressure at which the gas molecule mean free path is equal to the gap and which therefore provides viscous gas behavior, comprising the following steps:
- placing an object 1 in a chamber 2 having a controlled-temperature member 3 so that said object is spaced from said member by a small gap 5,
- maintaining said member at a target temperature by liquid circulation,
- evacuating the chamber to a pressure just sufficient to provide viscous gas behavior,
- adjusting the temperature of the object to match that of said member by gas conduction heat transfer across said small gap, and then
- evacuating the chamber to the desired vacuum.
That method of treating an object in a vacuum region, at a specified temperature, said vacuum region having a specified vacuum, comprising the following steps:
- placing an object 1 so as to be spaced from a controlled-temperature number 3 by a small gap 5 in a chamber 2 comprising a vacuum region before evacuation thereof to the desired vacuum and while the region is at a pressure which is greater than ten times the pressure at which the gas molecule mean free path is equal to the gap and which therefore provides viscous gas behavior, said chamber 2 having such a controlled-temperature member 3,
- maintaining said member at a target temperature by liquid circulation,
- evacuating the chamber to a pressure just sufficient to provide viscous gas behavior,
- adjusting the temperature of the object to match that of said member by gas conduction heat transfer across said small gap, and then
- transfering the object to the vacuum region.
That method of stabilizing the temperature of an object spaced from a controlled-temperature member by a small gap in a vacuum region before evacuation thereof to the desired vacuum and while the region is at a pressure which is greater than ten times the pressure at which the gas molecule mean free path is equal to the gap and which therefore provides viscous gas behavior, comprising the following steps:
- placing an object 1 in a chamber 2 having a controlled-temperature member 3 so that said object is spaced from said member by a small gap 5,
- maintaining said member at a target temperature by liquid circulation,
- evacuating at least 90% but less than 95% of the gas in the chamber,
- adjusting the temperature of the object to match that of said member by gas conduction heat transfer across said small gap, and then
- evacuating remaining gas in the chamber until the desired vacuum is attained.
Dependencies are inferred from the claim text.