Surface acoustic wave device having a lamination structure
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKazuo Eda, Yutaka Taguchi, Keiji Onishi, Shun-ichi Seki
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Abstract
A surface acoustic wave device includes: a single crystal piezoelectric substrate; a single crystal piezoelectric thin plate formed on the single crystal piezoelectric substrate, the single crystal piezoelectric thin plate being bonded to the single crystal piezoelectric substrate by direct bonding; and interdigital transducers formed on the single crystal piezoelectric thin plate, for exciting a surface acoustic wave in at least the single crystal piezoelectric thin plate.
Claims42
A surface acoustic wave device comprising:
- a single crystal piezoelectric substrate;
- a single crystal piezoelectric thin plate formed on said single crystal piezoelectric substrate, said single crystal piezoelectric thin plate being bonded to said single crystal piezoelectric substrate through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding;
- and
- interdigital transducers formed on said single crystal piezoelectric thin plate, for exciting a surface acoustic wave in at least said single crystal piezoelectric thin plate.
A surface acoustic wave device comprising:
- a single crystal piezoelectric substrate;
- a single crystal piezoelectric thin plate;
- an inorganic thin film layer formed between said single crystal piezoelectric substrate and said single crystal piezoelectric thin plate, at least one of said single crystal piezoelectric substrate and said single crystal piezoelectric thin plate being bonded to said inorganic thin film layer through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding;
- and
- interdigital transducers being in contact with one of said single crystal piezoelectric thin plate and said single crystal piezoelectric substrate, said interdigital transducers exciting a surface acoustic wave in at least said single crystal piezoelectric thin plate.
A surface acoustic wave device comprising:
- a non-piezoelectric substrate;
- a single crystal piezoelectric thin plate formed on said non-piezoelectric, said single crystal piezoelectric thin plate being bonded to said non-piezoelectric through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding;
- and
- interdigital transducers formed on said single crystal piezoelectric thin plate, for exciting a surface acoustic wave in at least said single crystal piezoelectric thin plate.
A surface acoustic wave device comprising:
- a non-piezoelectric substrate;
- a single crystal piezoelectric thin plate;
- an inorganic thin film layer formed between said non-piezoelectric and said single crystal piezoelectric thin plate, at least one of said non-piezoelectric and said single crystal piezoelectric thin plate being bonded to said inorganic thin film layer through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding;
- and
- interdigital transducers being in contact with one of said single crystal piezoelectric thin plate and said non-piezoelectric, said interdigital transducers exciting a surface acoustic wave in at least said single crystal piezoelectric thin plate.
Dependencies are inferred from the claim text.