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US 5,444,256 AGranted
Electrostatic lens and method for producing the same
AssigneeKabushiki Kaisha Toshiba
InventorsTakamitsu Nagai, Yuichiro Yamazaki, Motosuke Miyoshi
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Abstract
An electrostatic lens produces a smooth potential distribution along the center axis and is reduced in lens size and in total shape. A metal layer 13 is deposited at a certain position on an inner surface of insulating cylinder 11, and a high-resistance layer 12 is deposited on a portion except for the metal layer 13 on the inner surface of cylinder 11. A negative potential is applied from an external power source 19 to the metal layer 13, and the high-resistance layer 12 is earthed.
Claims10
An electrostatic lens comprising:
- an insulating cylinder;
- a metal layer deposited at a predetermined position on an inner surface of the insulating cylinder;
- and
- a high-resistance layer deposited on a portion other than said predetermined position on the inner surface of the insulating cylinder;
- wherein a voltage is applied from an external power source to said metal layer and wherein said high-resistance layer is grounded.
2 more elements
Dependencies are inferred from the claim text.