Gas inlet for a plurality of reactant gases into reaction vessel
AssigneeAixtron SE
InventorHolger Jurgensen
Life of this patent
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Abstract
A gas inlet for different reactant gases which flow into reaction vessels with high flow velocity. The cross sections of the gas inlet supply lines are substantially smaller than that of the reaction vessel. The gas inlet has a part with a conicoidal interior contour, the cross section of which is adapted to the cross section of the reaction vessel and which is arranged at one end of the reaction vessel through which flow occurs. The individual supply lines end at approximately the focal point of the part having the conicoidal interior contour. The gas exit openings of the supply lines are directed at the vertex of the part having the conicoidal interior contour.
Claims2
A gas inlet for flowing different reactant gases into a reaction vessel, comprising a hollow body having an exit opening arranged at one end of the reaction vessel and
- extending over a cross section of the hollow body,
- said hollow body also having a conicoidal interior contour at an end remote from the exit opening and the same free cross-section as the exit opening except for cross sections of the supply lines
- having gas exit openings and being arranged in relation to the conicoidal interior contour such that the gas exit openings of said supply lines are configured to partially spray and direct the different reactant gases toward the conicoidal interior contour so that a flow of different reactant gases toward the exit opening is homogeneously widened by the conicoidal interior contour and is further atomized by the flow of the different reactant gases from the supply lines.
Dependencies are inferred from the claim text.