Detector for force/acceleration/magnetism with respect to components in multi-dimensional directions

A force detector for detecting components in multidimensional directions of a force in an XYZ three-dimensional coordinate system, said detector comprising:

• a fixed body (20) having a flexible portion (21) deformed when a force is applied thereto;
• a displacement body (10) supported by said flexible portion;
• first detection means (D1 to D5, E1 to E5) for detecting a distance between a first displacement surface (11a) defined at a portion of said displacement body and a first fixed surface (20a) opposite to said first displacement surface and defined at a portion of said fixed body;
• second detection means (D6 to D13, E6 to E13) for detecting a distance between a second displacement surface (12a, 12b, 12c, 12d) intersecting with said first displacement surface and defined at a portion of said displacement body and a second fixed surface (22a, 22b, 22c, 22d) opposite to said second displacement surface and defined at a portion of said fixed body;
• and
• one of operational or arithmetic means (30 to 36) for arithmetically determining a force exerted on said displacement body every force components in the coordinate axis directions and moment components about the coordinate axes on the basis of a detection value obtained by said first detection means and a detection value obtained by said second detection means,
• wherein said first detection means include a first capacitance element constituted by a first displacement electrode formed on said first displacement surface and a first fixed electrode formed on said first fixed surface to carry out detection of a distance on the basis of a capacitance value of said first capacitance element, and
• wherein said second detection means includes a second capacitance element constituted by a second displacement electrode formed on said second displacement surface and a second fixed electrode formed on said second fixed surface to carry out detection of a distance on the basis of a capacitance value of said second capacitance element.

A detector for detecting components in multi-dimensional directions of a force in an XYZ three-dimensional coordinate system, said detector comprising:

• a fixed body (20) having a flexible portion (21) deformed when a force is applied thereto;
• a displacement body (10) supported by said flexible portion;
• first detection means (D1 to D5, E1 to E5) for detecting a distance between a first displacement surface (11a) defined at a portion of said displacement body and a first fixed surface (20a) opposite to said first displacement surface and defined at a portion of said fixed body;
• second detection means (D6 to D13, E6 to E13) for detecting a distance between a second displacement surface (12a, 12b, 12c, 12d) intersecting with said first displacement surface and defined at a portion of said displacement body and a second fixed surface (22a, 22b, 22c, 22d) opposite to said second displacement surface and defined at a portion of said fixed body;
• and
• one of operational or arithmetic means (30 to 36) for arithmetically determining a force exerted on said displacement body every force components in the coordinate axis directions and moment components about the coordinate axes on the basis of a detection value obtained by said first detection means and a detection value obtained by said second detection means,
• wherein there is further provided an acceleration detector such that a force produced due to acceleration is caused to be exerted on said displacement body, thus permitting detection of an acceleration.

A detector for detecting components in multi-dimensional directions of a force in an XYZ three-dimensional coordinate system, said detector comprising:

• a fixed body (20) having a flexible portion (21) deformed when a force is applied thereto;
• a displacement body (10) supported by said flexible portion;
• first detection means (D1 to D5, E1 to E5) for detecting a distance between a first displacement surface (11a) defined at a portion of said displacement body and a first fixed surface (20a) opposite to said first displacement surface and defined at a portion of said fixed body;
• second detection means (D6 to D13, E6 to E13) for detecting a distance between a second displacement surface (12a, 12b, 12c, 12d) intersecting with said first displacement surface and defined at a portion of said-displacement body and a second fixed surface (22a, 22b, 22c, 22d) opposite to said second displacement surface and defined at a portion of said fixed body;
• and
• one of operational or arithmetic means (30 to 36) for arithmetically determining a force exerted on said displacement body every force components in the coordinate axis directions and moment components about the coordinate axes on the basis of a detection value obtained by said first detection means and a detection value obtained by said second detection means,
• wherein there is further provided a detector for magnetism such that a force produced due to magnetism is caused to be exerted on said displacement body, thus permitting detection of magnetism.