Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMakoto Umetani, Masaki Aoki
Life of this patent
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Abstract
A die which can press-mold an accurate glass microoptical element such as a grating repetitively can be manufactured easily by adhering a thin film, having an inverse shape of the master of a micro-optical element, on the top flat plane of a hard base body and by forming a protective layer thereon. The die having an inverse shape of the master can press-mold glass repetitively. By press-molding glass with the die, a large number of reliable glass micro-optical elements of the same shape as the master can be produced at a low cost.
Claims15
A method of manufacturing a die used in forming a micro-optical element, said method comprising the steps of:
- providing a master of the micro-optical element to be manufactured;
- forming a first layer on the surface of said master, said first layer comprising a heat-resistant material and having first and second surfaces, said first surface of said first layer having a shape inverse to a shape of said master;
- separating said first layer from said master;
- flattening said second surface of said first layer;
- providing a base body having a first planar surface;
- adhering said second surface of said first layer to said first planar surface of said base body;
- and
- coating a second layer on said first surface of said first layer, said second layer comprising a material which does not adhere to glass and is heat-resistant at high temperatures.
A method of manufacturing a micro-optical element, comprising the steps of:
- providing a first die manufactured in the steps of:
- providing a master of the micro-optical element to be manufactured;
- forming a first layer on the surface of said master, said first layer comprising a heat-resistant material and having first and second surfaces, said first surface of said first layer having a shape inverse to a shape of said master;
- separating said first layer from said master;
- flattening said second surface of said first layer;
- providing a first base body having a first planar surface;
- adhering said second surface of said first layer to said first planar surface of said first base body;
- and coating a second layer on said first surface of said first layer, said second layer comprising a material which does not adhere to glass and is heat-resistant at high temperatures;
- providing a second die produced in the steps of grinding a surface of a second base body, and coating a third layer on said surface of said second base body, said third layer comprising a heat-resistant material;
- mounting a glass plate between said first and second dies;
- heating said glass plate above a softening temperature thereof;
- press-molding said glass plate between said first and second dies;
- and
- cooling said glass plate and removing said glass plate from between said first and second dies.
A micro-optical element manufactured by the steps of:
- providing a first die manufactured in the steps of:
- providing a master of the micro-optical element;
- forming a first layer on the surface of said master, said first layer comprising a heat-resistant material and having first and second surfaces, said first surface of said first layer having a shape inverse to a shape of said master;
- separating said first layer from said master;
- flattening said second surface of said first layer;
- providing a first base body having a first planar surface;
- adhering said second surface of said first layer to said first planar surface of said first base body;
- and coating a second layer on said first surface of said first layer, said second layer comprising a material which does not adhere to glass and is heat-resistant at high temperatures;
- providing a second die produced in the steps of grinding a surface of a second base body, and coating a third layer on said surface of said second base body, said third layer comprising a heat-resistant material;
- mounting a glass plate between said first and second dies;
- heating said glass plate above a softening temperature thereof;
- press-molding said glass plate between said first and second dies;
- and
- cooling said glass plate and removing said glass plate from between said first and second dies.
Dependencies are inferred from the claim text.