Gas injection system
AssigneeFEI Company
InventorJorgen Rasmussen
Life of this patent
Estimating the term…
Abstract
A gas injection system employs a crucible having a plurality of cylindrical bores within which gas is generated and a central passage leading to a dispensing nozzle. A chamber between the crucible bores and the central passage is sealed by a flexible membrane which is centrally clamped to a valve actuating rod that can be moved longitudinally via flexure of the membrane. A region behind the flexible membrane is sealed and vented to the system vacuum chamber whereby the enclosure within which the gas is generated is isolated.
Claims28
A gas injection system for mounting in a vacuum chamber adapted to receive a sample for subjection to particle beam irradiation, said system comprising:
- injection means for directing a stream of gas toward said sample, said injection means comprising a gas source housing for providing said gas, and valve means for controlling the flow of said gas;
- said housing forming an enclosure for containing said gas therewithin except for gas dispensed toward said sample;
- wherein a portion of the housing enclosure comprises a flexible sealing member in the form of a membrane;
- and
- an actuator operatively coupled through said membrane for operating said valve means by external actuation thereof with accommodating flexure of said membrane.
A gas injection system for mounting in a vacuum chamber adapted to receive a sample for particle beam irradiation, said system comprising:
- injection means for directing a stream of gas toward said sample, said injection means comprising a nozzle member having a small orifice directable toward a surface of said sample, a crucible for receiving material to be vaporized, including a gas passage for communicating between said crucible and said nozzle member, valve means for selectively closing said gas passage, and means for heating said crucible;
- said valve means being provided with actuating means having control means operable from outside said gas passage and crucible;
- and
- means isolating said control means from said gas passage and crucible including a flexible, relatively flat membrane through which said actuating means extends;
- said membrane providing a seal with said actuating means.
A gas injection system for mounting in a vacuum chamber adapted to receive a sample for particle beam irradiation, said system comprising:
- an elongated crucible for receiving material to be vaporized, said crucible having plural cavities extending upwardly to a first end of said crucible;
- a nozzle member joined to a second end of said crucible, said nozzle member having a small orifice directable toward a surface of said sample, said elongated crucible having a central passage extending through said crucible for communicating gas to said nozzle member, wherein said central passage is provided with valve means;
- means defining a chamber at said first end of said crucible for communicating from said plural cavities of said crucible to said central passage;
- said chamber-defining means including a flexible membrane disposed across said crucible in spaced relation to upper ends of said cavities and said central passage;
- a movable actuator for said valve means, said actuator extending longitudinally of said central passage and through said membrane in sealing relation thereto, said membrane preserving said seal while flexing with movement of said actuator;
- and
- means clamping the periphery of said membrane in sealing relation with respect to said first end of said crucible.
A gas injection system for mounting in a vacuum chamber adapted to receive a sample for particle beam irradiation, said system comprising:
- injection means for directing a stream of gas toward said sample, said injection means comprising a gas source housing including a heated crucible for generating said gas, a nozzle member through which said gas is dispensed, and valve means for controlling the flow of gas from said crucible to said nozzle member;
- wherein said crucible comprises a unitary block of metal provided with a longitudinal central passage leading to said nozzle member, and a plurality of elongated chambers in said block for receiving material to be vaporized to provide said gas, said elongated chambers comprising longitudinal bores in said block in substantially surrounding relation to said central passage.
Dependencies are inferred from the claim text.