Method and apparatus for low-temperature semiconductor processing
AssigneeTexas Instruments Incorporated
InventorsMehrdad M. Moslehi, Habib N. Najm, Ajit P. Paranjpe, Cecil J. Davis
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Abstract
A chilling system (12) has a container (20) filled with a coolant (22). A pipe (16) traverses within the container (20) and the coolant (22) to a housing (18). Fluid flows within the pipe (16) and becomes chilled through the pipe (16) upon entering the container (20) and the coolant (22). The chilled fluid enters the housing (18) chilling the housing (18) through the pipe (16). In turn, semiconductor substrate (19) in contact with the housing (18) also is chilled.
Claims45
An apparatus for low-temperature semiconductor processing, comprising:
- a container;
- a housing in contact with a semiconductor substrate;
- a pipe forming a path within said container and into said housing;
- a fluid flowing within said pipe, said container chills said fluid through said pipe, said fluid chills said housing and said semiconductor substrate in contact with said housing through said pipe;
- a coolant within said container;
- a level controller connected to said container, said level controller measures a level of said coolant within said container;
- and
- a coolant source connected to said container, said coolant source provides a supply of said coolant to said container, said level controller varies said suppply in response to said level within said container, and wherein said level controller adjusts a temperature of said fluid by varying said level in order to change an amount of said pipe immersed in said coolant.
An apparatus for low-temperature semiconductor processing, comprising:
- a container;
- a housing in contact with a semiconductor substrate;
- a pipe forming a path within said container and into said housing;
- a fluid flowing within said pipe, said container chills said fluid through said pipe, said fluid chills said housing and said semiconductor substrate in contact with said housing through said pipe;
- a coolant within said container;
- a level controller connected to said container, said level controller measures a level of said coolant within said container;
- and
- a coolant source connected to said container, said coolant source provides a supply of said coolant to said container, said level controller varies said suppply in response to said level within said container, and wherein said level controller adjusts a temperature of said fluid by varying said level in order to change an amount of said pipe immersed in said coolant;
- and
- wherein a temperature of said liquid is controlled by raising or lowering said pipe in said container.
An apparatus for low-temperature device processing, comprising:
- a container for holding a coolant;
- a housing in contact with a semiconductor substrate;
- a pipe forming a path within said container and into said housing;
- a liquid flowing within said path, said container chills said liquid through said pipe, said liquid chills said housing and said semiconductor substrate through said pipe;
- and
- a retractable plunger connected to said pipe to raise and lower said pipe within said container by contracting and expanding said flexible tubing.
An apparatus for low-temperature device processing, comprising:
- a container for holding a coolant;
- a housing in contact with a semiconductor substrate;
- a pipe forming a path within said container and into said housing;
- a liquid flowing within said path, said container chills said liquid through said pipe, said liquid chills said housing and said semiconductor substrate through said pipe, and wherein said container has an inner chamber for holding coolant and an outer chamber.
Dependencies are inferred from the claim text.