Process for fabricating layered superlattice materials and making electronic devices including same

A method of fabricating a layered superlattice material comprising the steps of:

• providing a substrate and a precursor containing a metal;
• thereafter
• prebaking said substrate at a target temperature;
• thereafter
• applying said precursor to said first substrate;
• and
• heating said precursor on said substrate up to an anneal temperature at most actual to said target temperature to form a layered superlattice material containing said metal on said substrate.

A method of fabricating a layered superlattice material comprising the steps of:

• providing a precursor comprising a metal dissolved in a first solvent, said precursor having a first value of solvent parameter;
• diluting said precursor with a selected quantity of a second solvent to provide said precursor with a second value of said solvent parameter different than said first value;
• thereafter
• applying said precursor to a substrate;
• and
• rapid thermal processing said precursor to form a layered superlattice material on said substrate.

A method of fabricating a layered superlattice material comprising the steps of:

• providing a solution having a solvent and a precursor having metal moieties in an effective amount for yielding the layered superlattice material from said precursor, said precursor having a formula including a respective metal moiety bonded with an organic ligand having a first functional group, said solvent having a second functional group identical to said first functional group;
• applying said solution to a substrate;
• and
• treating said precursor to form said layered superlattice material on said substrate.

A method of fabricating a layered superlattice material comprising bismuth and other metals, said method comprising the steps of:

• providing a substrate and a precursor including an amount of bismuth as compared to amounts of said other metals in excess of a proportional share of bismuth in a stoichiometric formula for the layered superlattice material comprising bismuth and said metals;
• applying said precursor to said substrate;
• and
• treating said substrate to produce the layered superlattice material.

A method of fabricating a layered superlattice thin film, said method comprising the steps of:

• providing a substrate;
• forming a first thin film by applying to said substrate a first precursor solution including a plurality of metal moieties in first molar portions effective for yielding a first layered superlattice material, said first molar portions being determined with respect to a mole of said first layered superlattice material capable of being formed from said first precursor solution;
• making a second thin film by depositing on said substrate a second precursor solution including said plurality of metal moieties in second molar portions effective for yielding a second layered superlattice material, at least one element of said second molar portions being different from said first molar portions, said second molar proportions being determined with respect to a mole of said second layered superlattice material capable of being formed from said second precursor solution;
• and
• heating said first and second thin films to form said layered superlattice thin film.

A method of fabricating a layered superlattice material comprising the steps of:

• providing a substrate and an essentially anhydrous liquid precursor containing a plurality of metals capable of forming a layered superlattice material;
• applying said precursor to said substrate;
• and
• rapid thermal processing said precursor on said substrate to form thereon a layered superlattice material.