Arc source macroparticle filter
AssigneeCommonwealth Scientific and Industrial Research Organization
InventorsPhilip J. Martin, Roger P. Netterfield, Terence J. Kinder
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Abstract
An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Toroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8).
Claims12
An arc source macroparticle filter comprising a cathode for emitting particles, an extended tubular anode adjacent and substantially coaxial with said cathode for accelerating said emitted particles, and means for generating a magnetic field to define a continuous non-linear plasma duct to direct preselected charged particles and separate therefrom undesirable larger particles, wherein said duct is minimally non-linear to permit high rates of charged particle transmission and the length of said anode is at least six times the diameter of said cathode.
An arc source macroparticle filter comprising a cathode for emitting particles, an extended tubular anode adjacent and substantially co-axial with said cathode for accelerating the emitted particles, means for generating a magnetic field to form the emitted particles into a continuous non-linear plasma duct and to direct preselected charged particles and separate therefrom undesirable larger particles, the duct being minimally non-linear to permit high rates of charge particle transmission, and means for maintaining the temperature of the anode below a predetermined temperature.
Dependencies are inferred from the claim text.