Gas purge unit for a portable container
AssigneeShinko Electric Co., Ltd.
InventorsHitoshi Kawano, Teppei Yamashita, Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Atsushi Okuno, Mitsuhiro Hayashi, Akio Nakamura
Life of this patent
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Abstract
A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet coupled to a gas supplying source, and a gas discharging outlet; and a lifting mechanism for closing the opening from inside of the purge box and controlling the locking and unlocking operations of a locking mechanism provided in the lid of the container.
Claims5
A gas purge unit for conveying semiconductor wafers comprising:
- a container including a container body having a flange extending about an opening of said container body, said container further including a lid adapted to extend across said opening so as to seal said container body;
- locking means carried by said lid, said locking means being shiftable between a locked condition in which said lid is secured across the opening of said container and an unlocked condition;
- a small integrally formed unitary purge box formed with an opening, said container body being adapted to be placed upon said purge box with the flange of said container body extending about the opening of said purge box;
- a container stand located in said purge box, said container stand including a flange adapted to sealingly engaged said purge box about the opening thereof;
- lifting means for moving said container stand and said lid within said purge box, said lifting means including means for shifting said locking means between said locked and unlocked conditions, said lifting means being located entirely within said purge box;
- a gas supplying inlet formed in said purge box, said gas supplying inlet being located at the opening of said purge box, between the flange of said container stand when the flange is positioned about the opening of said purge box and said lid when said lid extends across the opening of said container;
- and
- a gas discharge outlet formed in said purge box, said gas discharge outlet being located at the opening of said purge box, between the flange of said container stand when the flange of said container stand is positioned about the opening of said purge box and said lid when said lid extends across the opening of said container.
Dependencies are inferred from the claim text.