Bar code recipe selection system using workstation controllers

An apparatus for performing a process on a semiconductor wafer, said apparatus comprising:

• a bar code reader configured to read a bar code identifying said wafer and to output a signal indicating said bar code;
• a workstation controller coupled to said bar code reader, said workstation controller receiving lot information contained in said bar code identifying said wafer and outputting a request for a process step to apply said wafer, said request including said lot information;
• a host computer communicatively connected to said workstation controller and receiving said request from said workstation controller, said host computer having means for determining an appropriate process step to apply to said wafer according to said lot information and for sending process information indicating said appropriate process step to said workstation controller,
• process determination means in said workstation controller for determining an appropriate process to perform on said wafer, said workstation controller providing process information identifying said appropriate process;
• and
• a tool communicatively connected to said workstation controller and receiving said process information, said tool applying said appropriate process to said wafer placed in said tool in accordance with said process information.

An apparatus for performing a process on one or more wafers, said apparatus comprising:

• a first and second bar code reader for reading a bar code identifying a semiconductor wafer and respectively providing first and second lot information indicative thereof;
• a first workstation controller communicatively connected to said first bar code reader to receive said first lot information;
• a second workstation controller communicatively connected to said second bar code reader to receive said second lot information;
• a first and second tool communicatively connected to said first and second workstation controller, respectively;
• a host computer communicatively connected to said first workstation controller and said second workstation controller, said host computer receiving first and second requests from said first and second workstation controller, respectively, and sending first step information to said first workstation controller, in response to said first request, corresponding to a first tool process step to be applied by said first tool, and for sending second step information to said second workstation controller, in response to said second request, corresponding to a second tool process step to be applied by said second tool;
• process determination means in said first and second workstation controllers for determining a first tool process and a second tool process for said first and second tool, respectively, according to said first tool process step and said second tool process step, and means for providing said first and second tool processes to said first and second tools, respectively,
• wherein said first tool responds to said first provided tool process from said first workstation controller to perform said first tool process on a wafer placed in said first tool, and said second tool responds to said second provided tool process from said second workstation controller to perform said second tool process on a wafer placed in said second tool.