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AssigneeThe Regents of the University of California
InventorsRichard E. Russo, Ronald P. Reade, Stephen M. Garrison, Paul Berdahl
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A process for depositing a biaxially aligned intermediate layer over a non-single crystal substrate is disclosed which permits the subsequent deposition thereon of a biaxially oriented superconducting film. The process comprises depositing on a substrate by laser ablation a material capable of being biaxially oriented and also capable of inhibiting the migration of substrate materials through the intermediate layer into such a superconducting film, while simultaneously bombarding the substrate with an ion beam. In a preferred embodiment, the deposition is carried out in the same chamber used to subsequently deposit a superconducting film over the intermediate layer. In a further aspect of the invention, the deposition of the superconducting layer over the biaxially oriented intermediate layer is also carried out by laser ablation with optional additional bombardment of the coated substrate with an ion beam during the deposition of the superconducting film.
A process for forming a biaxially oriented layer on a substrate in a deposition chamber which comprises:
A process for forming a biaxially oriented intermediate layer on a non-single crystal substrate which comprises:
A process for forming a biaxially oriented superconducting film on a non-single crystal substrate which comprises:
Dependencies are inferred from the claim text.