Aberration correction method and aberration correction apparatus

An aberration correction apparatus in which, at a stage of reconstructing a hologram by making a plane wavefront for reconstruction incident on said hologram, which hologram contains the record of interference fringes formed by a reference plane wavefront and an object wavefront modulated by a sample, an aberration of an optical system used to record said hologram is canceled by a phase distribution carried by an optical element for correction, thereby correcting the aberration, said apparatus comprising:

• a light source for applying the plane wavefront to said hologram;
• an electrooptic element panel having a spatial phase modulation function;
• means for controlling a phase distribution on said electrooptic element panel;
• and
• an optical system for selecting only first-order diffracted light from said hologram at a Fourier transform plane of said hologram and applying said first-order diffracted light to said electrooptic element panel.

An aberration correction apparatus having a cancelling means for cancelling an aberration of an object wavefront by a phase distribution carried by an optical element for correction, thereby correcting the aberration, said apparatus comprising:

• an optical system for Fourier transforming an incident object wavefront;
• an electrooptic element panel having a spatial phase modulation function, which is disposed on a Fourier transform plane of the incident object wavefront;
• means for allowing interference between the corrected object wavefront and a reference wavefront on an imagery plane of the object wavefront;
• means for changing a phase difference between the two wavefronts in a plurality of stages in the range from 0 to 2.pi.;
• means for obtaining a phase distribution of the corrected object wavefront from an interference fringe intensity distribution corresponding to each phase difference, and
• further comprising means for taking a corrected image by an imaging device;
• means for inputting data on the corrected image through an image memory to a computer, said computer comprising means for evaluating the corrected image by a predetermined evaluation function and making correction repeatedly, and
• control means for changing the phase distribution on said electrooptic element panel incrementally through said phase distribution control means, until the corrected image satisfies said predetermined evaluation function.

An aberration correction apparatus in which an aberration of an object wavefront is canceled by a phase distribution carried by an optical element for correction, thereby correcting the aberration, said apparatus comprising:

• an optical system for Fourier transforming an incident object wavefront;
• a liquid crystal panel in which each pixel comprises a sandwich cell of a nematic liquid crystal of homogeneous alignment having, said liquid crystal panel having a spatial phase modulation function, which is disposed on a Fourier transform plane of the incident wavefront;
• and
• means for controlling a phase distribution on said light crystal panel,
• means for allowing interference between the corrected object wavefront and a reference wavefront on an imagery plane of the object wavefront, and means for changing a phase difference between the two wavefronts in a plurality of stages in the range of from 0 to 2.pi., and means for obtaining a phase distribution of the corrected object wavefront from an interference fringe intensity distribution corresponding to each phase distribution.