Infrared detecting device and infrared detecting element for use in the device
AssigneeMatsushita Electric Works, Ltd.
InventorsShigeaki Tomonari, Jun Sakai, Kouichi Aizawa, Keizi Kakite, Takayoshi Awai, Takuro Nakamura, Takuro Ishida, Tsutomu Ichihara, Hitoshi Yoshida, Shigenari Takami, Sadayuki Sumi
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Abstract
An infrared detecting arrangement includes an infrared detecting element having a heat insulating film and an infrared detector which are disposed between an interior space of a hermetically sealed casing for the element and a cavity formed within a substrate of the element and communicating through a ventilator with the interior space.
Claims13
An infrared detecting device comprising a hermetically sealed casing and an infrared detecting element accommodated in said casing,
- wherein the infrared detecting element comprises a substrate having a cavity defined therein, a heat insulation film provided on the substrate, an infrared detector provided on the heat insulation film to be disposed between interior space of the casing and the cavity in the substrate, and means for communicating interior space of the cavity defined in the substrate with the interior space of the casing, said communicating means being provided for maintaining a pressure difference between the interior space of the cavity in the substrate and the interior space of the casing to be less than a predetermined value.
An infrared detecting element comprising a substrate having therein a cavity, a heat insulation film provided on the substrate, and an infrared detector provided on the heat insulation film at a position corresponding to the cavity in the substrate, said infrared detector including a thermistor, a set of electrodes connected to the thermistor, and a covering infrared absorbing film provided on the thermistor and consisting essentially of silicon oxynitride.
A thermistor comprising an amorphous alloy semiconductor thin film, and a pair of upper and lower single element semiconductor thin films holding between them said amorphous alloy semiconductor thin film.
Dependencies are inferred from the claim text.