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US 5,426,164 AGranted
Photodefinable polymers containing perfluorocyclobutane groups
AssigneeThe Dow Chemical Company
InventorsDavid A. Babb, W. Frank Richey, Katherine S. Clement, Eric S. Moyer, Marius W. Sorenson
Life of this patent
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Abstract
A polymer has at least one photoactive site and more than one perfluorocyclobutane group. New monomers containing photoactive sites or photoactive precursors and at least one perfluorovinyl group are useful for making such polymers. Processes of making such polymers and the monomers from which they are made are disclosed. The polymers are useful in coatings, photoresists, and the like.
Claims29
A polymer comprising at least one photoactive site and more than one perfluorocyclobutane group.
Dependencies are inferred from the claim text.