Coupling-type clean space apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKazuhiro Mori, Yoshiyuki Kubota, Naoyuki Hashimoto, Tatsuki Nogiwa
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Abstract
According to the present invention, chamber units are sequentially coupled with each other to thereby provide a volume of clean space, and whereby different environments can be maintained in the different chamber units. An air blowhole or door is provided at an opening section of each chamber unit. Moreover, a space section can be defined at the coupling part of the chamber units, and a suction pump and a suction hose can be provided in the space section, so as to prevent the environments of the different chambers from influencing one another.
Claims22
A clean space apparatus comprising:
- a first chamber unit having a first enclosed space therein and including a first wall with a first opening formed therethrough;
- a first air circulating device mounted to said first chamber unit;
- a first dust removal device mounted to said first chamber unit and operably coupled with said first air circulating device;
- a second chamber unit having a second enclosed space therein and including a second wall with a second opening formed therethrough;
- a second air circulating device mounted to said second chamber unit;
- wherein said first and second chamber units are coupled together such that said first opening is aligned with said second opening and said first enclosed space is sequentially communicated with said second enclosed space;
- and
- wherein an air blowing means is mounted at one of said first and second openings for creating, while said first and second chamber units are coupled together an air curtain substantially parallel to a respective one of said first and second walls and traversing said one of said first and second openings to prevent contaminants from passing from one to the other of said first and second enclosed spaces through said one of said first and second openings.
A clean space apparatus comprising:
- a first chamber unit having a first enclosed space therein and including a first wall with a first opening formed therethrough;
- a first air circulating device mounted to said first chamber unit;
- a first dust removal device mounted to said first chamber unit and operably coupled with said first air circulating device;
- a second chamber unit having a second enclosed space therein and including a second wall with a second opening formed therethrough;
- a second air circulating device mounted to said second chamber unit;
- wherein said first and second chamber units are coupled together such that said first opening is aligned with said second opening and said first enclosed space is sequentially communicated with said second enclosed space;
- wherein said first and second chamber units are separate and discrete units respectively defining said first and second enclosed spaces therein;
- and
- wherein a linearly slidable door is slidably mounted between said first and second openings for movement between open and closed positions to selectively allow said first enclosed space to be completely isolated from said second enclosed space.
Dependencies are inferred from the claim text.