Trap device for vapor phase reaction apparatus

A trap device for a vapor phase reaction apparatus comprising:

• a hermetically constructed enclosure vessel;
• a multilayer structural member including a plurality of ring shaped plate members disposed in the enclosure vessel horizontally, the ring shaped plate members being disposed such that a plurality of ring shaped members are arranged in the vertical direction in a plurality of separate vertical columns, wherein said multilayer structural member is arranged so as to partition said enclosure vessel into an inner side space and an outer side space with respect to said ring shaped plate members;
• a gas inlet section for introducing gas into the outer side space of said enclosure vessel partitioned by said multilayer structural member;
• and
• a gas outlet section for removing gas from the inner side space of said enclosure vessel partitioned by said multilayer structural member.

A trap device for a chemical vapor deposition apparatus, wherein the trap device removes reactive components from an exhaust gas flow, the trap device comprising:

• a hermetically constructed enclosure vessel for attaching to vacuum;
• a multilayer structural member including a plurality of ring shaped plate members disposed in the enclosure vessel horizontally, the ring shaped plate members being disposed such that a plurality of ring shaped members are disposed in the vertical direction and spaced apart such that the reactive components in the exhaust gas strike the ring shaped plate members and adhere thereto, wherein said multilayer structural member is arranged so as to partition said enclosure vessel into an inner side space and an outer side space with respect to said ring shaped plate members;
• a cooling means at the inner side space of said enclosure vessel;
• a gas inlet opening for introducing exhaust gas into the outer side space of said enclosure vessel partitioned by said multilayer structural member;
• and
• a gas outlet opening for removing gas from the inner side space of said enclosure vessel partitioned by said multilayer structural member, wherein said gas outlet seetitian is connected to vacuum.