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US 5,417,823 AGranted
Metal-nitrides prepared by photolytic/pyrolytic decomposition of metal-amides
AssigneeFord Motor Company
InventorsChaitanya K. Narula, Michel M. Maricq
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Abstract
This invention is directed to a method for preparing materials comprising metal nitrides by the photolytic/pyrolytic decomposition of metal amides. The metal amides may be zirconium and/or niobium amides, which may additionally contain titanium amides.
Claims8
A method of preparing materials comprising metal nitrides by photolytic/pyrolytic decomposition of metal amides, which method comprises:
- providing metal amides selected from the group consisting of (a) Zr[R.sub.2 N].sub.4 ;
- (b) Nb[R.sub.2 N].sub.4 ;
- (c) mixtures of (a) and (b);
- and (d) mixtures of any of (a), (b), or (c) with Ti[R.sub.2 N].sub.4 ;
- wherein R is an organic group;
- irradiating said metal amides to decompose at least a portion of said metal amides to an metal-organic residue;
- removing undecomposed metal amides from said metal-organic residue;
- and
- pyrolyzing said metal-organic residue in an inert or ammonia atmosphere at an elevated temperature to form a material comprising metal nitrides selected from the group consisting of (a) ZrN;
- (b) Nb.sub.4 N.sub.3 ;
- (c) mixtures of (a) and (b);
- and (d) mixtures of any of (a), (b), or (c) with TiN.
9 more elements
Dependencies are inferred from the claim text.