Inverted epitaxial process semiconductor devices
AssigneeUnitrode Corporation
InventorScott C. Blackstone
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Abstract
A semiconductor device is disclosed having improved vertical gain symmetry, and which includes thick, lightly-doped regions which are dielectrically isolated and provided by at least two separately processed semiconductor wafers which are bonded together and further processed to provide the finished device. Alternate embodiments include buried layers exhibiting very low resistance. Further alternate embodiments provide high voltage and/or high current devices which are fabricated together with low-power circuitry as an integrated circuit.
Claims7
A semiconductor structure in which at least one semiconductor device is disposed, said semiconductor structure comprising:
- a first semiconductor wafer having a first doped region of a first dopant forming a first active portion of said at least one semiconductor device;
- and
- a second semiconductor wafer bonded to said first semiconductor wafer at an interface and having a second doped region forming a second active portion of said at least one semiconductor device, wherein one of said first and second semiconductor wafers has a surface adjacent to said interface in which an insulating region is disposed and a non-insulating region is disposed, and wherein one of the first doped region of said first semiconductor wafer and the second doped region of said second semiconductor wafer is spaced from said interface.
A bonded semiconductor in which is formed at least one semiconductor device, said bonded semiconductor comprising:
- a first semiconductor wafer having a first doped region of a first dopant forming a first active portion of said at least one semiconductor device;
- a second semiconductor wafer bonded to said first semiconductor wafer at an interface and having a second doped region of said first dopant forming a second active portion of said at least one semiconductor device;
- and
- wherein one of said first and second semiconductor wafers has a surface adjacent to said interface with an aperture in which an insulating region is disposed, said one of said first and second semiconductor wafers having a non-insulated region disposed in a portion of said surface adjacent to said aperture to prevent current flow between said first doped region and said second doped region through said insulating region and to permit substantially symmetric current flow between said first and said second doped regions through said non-insulated region.
Dependencies are inferred from the claim text.