Process for making alkyl arsine compounds
AssigneeCytec Technology Corp.
InventorsC. Joseph Calbick, Mark A. Kuck, Donald H. Valentine
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Abstract
Alkyl arsines are made by a reaction of gaseous arsine and the corresponding gaseous olefin in contact with at least one Bronsted acid catalyst. Products produced thereby are mono- and di-substituted arsines, e.g. alkyl and di-alkyl arsines, which contain substantially no metallic or oxygenating impurities.
Claims6
A process for the production of arsenic-containing semiconductor articles which comprises continuously contacting, in the vapor phase, an olefin and arsine over a Bronsted Acid catalyst to produce an alkylarsine, utilizing said alkylarsine as the volatile source of arsenic during metalorganic chemical vapor deposition and recovering the resultant semi-conductor article.
A process for the production of arsenic-containing semiconductor articles which comprises continuously contacting, in the vapor phase, an olefin and arsine over a Bronsted Acid catalyst, condensing the resultant alkylarsine, utilizing said alkyl arsine as the volatile source of arsine during metalorganic chemical vapor deposition and recovering the resultant semi-conductor article.
Dependencies are inferred from the claim text.