One atmosphere, uniform glow discharge plasma
AssigneeThe University of Tennessee Research Corporation
InventorsJohn R. Roth, Peter P. Tsai, Chaoyu Liu, Mounir Laroussi, Paul D. Spence
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Abstract
A steady-state, glow discharge plasma is generated at one atmosphere of pressure within the volume between a pair of insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. Space between the electrodes is occupied by air, nitrous oxide, a noble gas such as helium, neon, argon, etc. or mixtures thereof. The electrodes are charged by an impedance matching network adjusted to produce the most stable, uniform glow discharge.
Claims27
Apparatus to generate and maintain a glow discharge plasma at a pressure of about 1 atmosphere, the apparatus comprising
- a pair of electrically insulated electrodes aligned and secured in equidistant opposition,
- means for supplying and maintaining a glow discharge plasma sustaining gas at a pressure of about one atmosphere in the volumetric space between said electrodes, and
- radio frequency (RF) amplifier means for generating and maintaining a glow discharge plasma by energizing said electrodes with a potential of 1 to at least 5 kV rms at 1 to 100 kHz, wherein said radio frequency amplifier means includes an impedance matching network.
A method of generating and maintaining a uniform glow discharge plasma at a pressure of about 1 atmosphere within a volumetric space between two electrodes energized by radio frequency amplifier means having an impedance matching network, said method comprising the steps of operating said amplifier means to energize said electrodes with a potential of 1 to at least 5 kV rms at 1 to 100 kHz frequency while charging and maintaining the volumetric space between said electrodes with a glow discharge plasma sustaining gas at approximately 1 atmosphere of pressure.
Dependencies are inferred from the claim text.