CVD of silicon-based ceramic materials on internal surface of a reactor
AssigneeEnichem S.p.A.
InventorsRichard Cruse, Veronika Szalai, Terence Clark, Stephen Rohman, Robert Mininni
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Abstract
In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a thin layer of a ceramic material, the layer being deposited by thermal decomposition of a non-oxygen containing silicon-nitrogen precursor in the vapor phase, in an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.
Claims23
In a method for protecting from coking the inner surface of a chemical reactor by decomposing a precursor compound in the vapor phase inside the reactor, in an inert or reducing gas atmosphere to form a thin layer of a ceramic material on the inner surface of the chemical reactor, the improvement comprising said precursor, containing nitrogen, carbon and hydrogen atoms and at least two silicon atoms, wherein at least two silicon atoms are bonded to a single nitrogen atom, with the proviso that when the precursor contains only two or three silicon atoms bonded to a single nitrogen atom, said precursor is selected from compounds containing at least one alkyl group bonded to a silicon atom, said alkyl group having at least two carbon atoms.
Dependencies are inferred from the claim text.