Probing device setting a probe card parallel
AssigneesTokyo Electron Yamanashi Limited, Tokyo Electron Limited
InventorsHitoshi Fujihara, Itaru Takao
Life of this patent
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Abstract
A probe apparatus comprises a test head for electrically testing a chip of a semiconductor wafer, a probe card having a plurality of probe needles electrically connected to the test head, a table plate for supporting the semiconductor wafer such that the semiconductor wafer faces the probe card, a CCD camera for detecting heights at predetermined two pairs of points on the probe card and outputting signals corresponding to the heights, and three leg members for driving the table plate such that the semiconductor wafer supported by the table plate is parallel to the probe card, on the basis of distances between the two pairs of points in X- and Y-directions which are obtained from X- and Y-directional movement amounts of the table plate.
Claims16
A probe apparatus comprising:
- a test head for electrically testing a test object;
- a probe card having a plurality of probe needles electrically connected to said test head;
- means for supporting the test object such that the test object faces the probe card and the probe needles extend toward the test object;
- means for detecting an inclined state of the probe card with respect to a plane and outputting a signal corresponding to the inclined state;
- said detecting means including:
- imaging means for detecting the relative heights at two mutually distant points of the probe card on the basis of auto-focus adjustment amount at this time and outputting height signals corresponding to these heights,
- distance signal outputting means for outputting distance signals corresponding to the distance between the two points of said probe card, and
- calculation means for calculating the inclined state of the probe card with respect to a plane and outputting the calculation result;
- and
- means for driving said support means on the basis of the output signal from said detection means, such that the test object supported by said support means is parallel to the probe card.
A probe apparatus comprising:
- a test head for electrically testing a test object;
- a probe card attached to the lower surface of said test head and having a plurality of probe needles electrically connected to said test head, the probe needles being arranged in at least one row and extending downwards;
- means for horizontally supporting said test object such that the test object faces the probe card upward;
- an XY table provided below said support means;
- inclining means, provided between the supporting means and the XY table, for inclining the supporting means to vary the angle of inclination of the supporting means with respect to a horizontal plane, said inclining means having an upper part for supporting the supporting means and a lower part connected to the XY table;
- and
- means for detecting an inclined state of the probe card with respect to horizontal plane,
- said detecting means including:
- imaging means for detecting a relative height at two mutually distant points in an X-direction and the heights at two mutually distant points in a Y-direction perpendicular to the X-direction, on the basis of auto-focus adjustment amount at their time, and outputting height signals corresponding to these heights,
- distance signal outputting means for outputting distance signals corresponding to the distance between the two points in each of said directions, and
- calculation means for calculating the inclined state of the probe card with respect to a plane and outputting a calculation result;
- and
- means for driving the XY table on the basis of the output signal from said detecting means, such that the test object supported by the XY table is parallel to the probe card.
Dependencies are inferred from the claim text.