Method for manufacturing discharge cathode device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorShinichirou Nagano
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Abstract
According to the present invention there is provided a discharge cathode device comprising: a substrate, an Al layer formed on the substrate, and a layer of hexaboride of lanthanoid or yttrium formed on the Al layer. There are also provided a method for manufacturing the same and a gas discharge display device having the same. This cathode device including a multilayer structure exhibits excellent conductivity, flexibility, and thermal oxidation resistance and also can be produced at low cost. The gas discharge display device achieves superior insulation and can be produced with the small number of steps.
Claims7
A method for manufacturing a discharge cathode device comprising the steps of:
- preparing a substrate;
- forming an Al layer on the substrate;
- forming a layer of hexaboride of lanthanoid or yttrium on the Al layer;
- and
- etching the Al layer together with the layer of hexaboride so as to pattern the discharge cathode device.
A method for manufacturing a discharge cathode device comprising the steps of:
- forming a multilayer cathode pattern including an Al layer and a layer of hexaboride of lanthanoid or yttrium on a dielectric glass plate;
- forming a connecting electrode connected to the multilayer cathode pattern on the dielectric glass plate;
- and
- sintering the connecting electrode under temperature lower than a softening point of the dielectric glass plate.
A method for manufacturing a discharge cathode device comprising the steps of:
- preparing a substrate;
- forming a Cr layer on the substrate;
- forming an Al layer on the Cr layer;
- forming a layer of hexaboride of lanthanoid or yttrium on the Al layer;
- and
- etching the Al layer together with the layer of hexaboride so as to pattern the discharge cathode device.
A method for manufacturing a discharge cathode device comprising the steps of:
- preparing a substrate;
- forming a thin dielectric film on the substrate;
- forming a Cr layer on the thin dielectric film;
- forming an Al layer on the Cr layer;
- forming a layer of hexaboride of lanthanoid or yttrium on the Al layer;
- and
- etching the Al layer together with the layer of hexaboride so as to pattern the discharge cathode device.
A method for manufacturing a discharge cathode device comprising the steps of:
- forming a multilayer cathode pattern including a Cr layer, an Al layer and a layer of hexaboride of lanthanoid or yttrium on a dielectric glass plate;
- forming a connecting electrode connected to the multilayer cathode pattern on the dielectric glass plate;
- and
- sintering the connecting electrode under temperature lower than a softening point of the dielectric glass plate.
A method for manufacturing a discharge cathode device comprising the steps of:
- forming a multilayer cathode pattern including at least an Al layer and a layer of hexaboride of lanthanoid or yttrium on a substrate;
- and
- arranging an insulator between adjacent cathodes of the cathode pattern.
Dependencies are inferred from the claim text.