Substrates processing device
AssigneesTokyo Electron Limited, Tokyo Electron Kyushu Limited, Kabushiki Kaisha Toshiba
InventorsMasami Akimoto, Kazuyuki Gotou, Yasushi Ito, Katsuya Okumura
Life of this patent
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Abstract
A substrates processing device having a tank in which process solution is contained, a bottle communicated with the tank through a conduit and located above an object to be processed with the process solution supplied, a nozzle located under the bottle, a support for supporting the object to be processed, and a changeover device for making pressure in it negative through a conduit when the process solution is to be added to it and also making pressure in it normal through the conduit when the process solution is to be supplied to the nozzle.
Claims17
A substrate processing device comprising:
- a tank for containing process solution;
- a bottle communicating with the tank through a first conduit and located above an object to be processed with the process solution supplied;
- a nozzle communicating with said bottle through a second conduit and located under said bottle;
- means for supporting the object to be processed and located below said nozzle;
- a changeover means for making pressure in said bottle negative through a third conduit, thereby to introduce the process solution into said bottle, and also making the pressure normal through the third conduit, thereby to supply the process solution to the nozzle, and connected to said bottle;
- and
- means for maintaining a distance between a top level of the process solution in said bottle and a front end of the nozzle constant.
A substrate processing device comprising:
- a tank for containing process solution;
- process solution adding means communicating with said tank through a first conduit and located above an object to be processed with said process solution supplied;
- a bottle communicating with said solution adding means through a fourth conduit and located under said solution adding means;
- a nozzle communicating with said bottle through a second conduit and located under said bottle;
- an optical sensor located outside the bottle, for detecting the top level of said process solution in said bottle;
- control means connected to said optical sensor, for controlling changeover means in response to information applied from said optical sensor and representing the top level of said process solution detected;
- means for supporting the object to be processed and located below said nozzle;
- and
- a changeover means for making pressure in said bottle negative through a third conduit, thereby to introduce said process solution into said bottle, and also for making pressure in said bottle normal through the third conduit, thereby to supply said process solution to the nozzle, and connected to said bottle,
- wherein a distance between a top level of the process solution in said bottle and a front end of the nozzle is kept constant.
A substrate processing device comprising:
- a tank for containing process solution;
- a bottle communicating with said tank through a first conduit and located above an object to be processed with said process solution supplied;
- a nozzle communicating with said bottle through a second conduit and located under said bottle;
- an optical sensor located outside said bottle, for detecting the top level of said process solution in said bottle;
- control means connected to said optical sensor, for controlling changeover means in response to information applied from said optical sensor and representing the top level of said process solution detected;
- bottle lifter means for moving said bottle up and down in response to the information representing the top level of said process solution, and connected to said bottle;
- means for supporting said object to be processed and located below said nozzle;
- and
- a changeover means for making pressure in said bottle negative through a third conduit, thereby to introduce the process solution into said bottle, and also for making the pressure normal through the third conduit, thereby to supply said process solution to the nozzle, and connected to said bottle.
Dependencies are inferred from the claim text.