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US 5,404,111 AGranted
Probe apparatus with a swinging holder for an object of examination
AssigneesTokyo Electron Limited, Tokyo Electron Yamanashi Limited
InventorsShigeoki Mori, Wataru Karasawa, Hitoshi Fujihara, Masaru Suzuki, Keiichi Yokota
Life of this patent
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Abstract
A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.
Claims11
A probe apparatus comprising:
- a probe card having a plurality of probes;
- holding means located above or beside said probe card, for holding an object to be examined;
- a tester head electrically connected to the probes of said probe card;
- a tester electrically connected to said tester head, for detecting electrical characteristics of the object from data output from the object;
- imaging means arranged to oppose the object, for detecting a position of the object;
- and
- means for swinging said holding means to a first position where a surface of the object faces said probe card, or a second position where the surface of the object faces said imaging means.
4 more elements
Dependencies are inferred from the claim text.