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US 5,403,665 AGranted
Method of applying a monolayer lubricant to micromachines
AssigneeThe Regents of the University of California
InventorsRodney L. Alley, Roger T. Howe, Kyriakos Komyopoulos
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Abstract
A micromachine is lubricated in a fluid-based process. The known fluid-based process of releasing a sacrificial layer from a micromachine is followed by a fluid-based hydrophilic processing of the micromachine surfaces. A lubricating monolayer surface is then formed on the resultant hydrophilic micromachine surfaces. Afterwards, the surfaces are dried through conventional means.
Claims19
A method of fabricating a lubricated micromachine, said method comprising the steps of:
- releasing a protective sacrificial layer from said micromachine in an aqueous immersion process;
- converting hydrophobic surfaces of said micromachine to hydrophilic surfaces in an aqueous immersion process;
- applying a thin-film lubricant to said micromachine in a fluid-based immersion process after said releasing step and before said micromachine is dried;
- and
- drying said thin-film lubricant after said applying step.
2 more elements
A method of fabricating a micromachine, said method including the steps of:
- releasing a sacrificial protective layer encasing said micromachine in an aqueous process to expose hydrophobic micromachine surfaces;
- converting said hydrophobic micromachine surfaces to hydrophilic micromachine surfaces in an aqueous process;
- constructing lubricant surfaces on said hydrophilic micromachine surfaces in a fluid-based process before said micromachine is dried;
- and
- drying said micromachine.
2 more elements
Dependencies are inferred from the claim text.