Reduced electron scattering phosphor screen for high resolution transmission electron microscope imaging

A method of imaging a specimen by transmission of electrons with energies below 1 MeV, said method comprising:

• passing a beam of electrons from an electron source through said specimen to produce a first transmitted electron beam, the electrons of said beam of electrons having energies that are less than 1 MeV;
• passing the first transmitted electron beam through an imaging screen to generate a light image and a second transmitted electron beam, said imaging screen comprising a support structure and a light generating layer formed on a side of said support structure that is proximate to said electron source, said support structure having a thickness that is less than one half the Kanaya-Okayama range of electrons in said support structure, said light generating layer having a thickness less than about 10 microns;
• and
• focusing the generated light image onto an electronic camera.