Semiconductor device of multichip module-type
AssigneeKabushiki Kaisha Toshiba
InventorsYasuhiro Yamaji, Yoichi Hiruta, Tsutomu Nakazawa, Katsuto Katoh, Yoshihiro Atsumi, Naohiko Hirano, Akihiro Mase
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Abstract
A semiconductor chip is packaged within film carriers which serve as the enclosure of the semiconductor chip. The finished semiconductor device is flexible, bendable, and very thin. In manufacturing this semiconductor device, the process of laminating film carriers, the process of electrically connecting the semiconductor chip and film carriers, and the process of sealing the semiconductor chip, can be performed at the same time, shortening the manufacturing time and reducing manufacturing cost.
Claims7
A method of manufacturing a semiconductor device comprising the steps of:
- forming a wiring pattern by printing conductive paste on each of a plurality of film carriers, and forming holes at the position where viahole connections are necessary;
- and
- laminating said plurality of semiconductor chips, heating and compressing said laminated film carriers within which semiconductor chips are packaged with electrode pads of said semiconductor chips being aligned to said wiring pattern, to perform at the same time the processes of laminating said film carriers, electrically connecting said semiconductor chips to said film carriers, and sealing said semiconductor chips.
A method of manufacturing a semiconductor device comprising the steps of:
- forming wiring patterns by using conductive paste on a first, second and third plastic film;
- forming holes in the second plastic film at positions where via hole connections are to be made;
- laminating the first, second and third plastic films by heating and pressurizing them into a flexible state in which a plurality of semiconductor chips having electrode pads are interposed between the second plastic film and the third plastic film, and the electrode pads of the semiconductor chips are connected electrically to the wiring patterns of the first plastic film through the holes in the second plastic film, at the same time electrically connecting the semiconductor chips to the wiring patterns of the first plastic film;
- and
- sealing the resulting semiconductor device.
Dependencies are inferred from the claim text.