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US 5,401,542 AGranted
Magnetoresistive magnetic head and its manufacturing method
AssigneeHitachi, Ltd.
InventorsMasahiro Kitada, Noboru Shimizu, Hideo Tanabe, Hitoshi Nakamura
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Abstract
In a magnetoresistive magnetic head which has a permalloy film (2, 22) as the magnetoresistive film and also has a shunt film for applying a transverse biasing magnetic field, an Nb film (3, 23) is formed as the shunt film by the electron-beam evaporation method to increase the heat resistance of the magnetoresistive element, thus making it possible to increase the temperature at which the magnetic head is manufactured.
Claims7
A method of manufacturing a magnetoresistive magnetic head comprising the steps of:
- forming a magnetoresistive film of 50-1000 .ANG. thickness on a substrate, the magnetoresistive film being formed of an Ni-Fe alloy film which contains 7 to 27 wt % of Fe and a virtually remaining percentage of Ni;
- forming a shunt film on the magnetoresistive film by electron-beam evaporation while controlling said substrate to a temperature in the range of 150.degree. to 350.degree. C., the shunt film being formed of an Nb film, of which the thickness is at least equal to and at most twice that of the magnetoresistive film;
- and
- forming electrodes of conducting materials on surface portions of said Nb film.
1 more element
Dependencies are inferred from the claim text.