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US 5,401,473 AGranted
Method and apparatus for treatment of NF.sub.3 gas
AssigneeDaidousanso Co., Ltd.
InventorsAkira Yoshino, Takakazu Tomoda
Life of this patent
Estimating the term…
Abstract
In accordance with this invention, a waste gas containing toxic NF.sub.3 gas is contacted with a honeycomb structure of a carbonaceous material to thereby convert NF.sub.3 into nontoxic CF.sub.4 and N.sub.2 gases with high efficiency.
Claims10
An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas,
- a reactor unit having an axis and communicating with one end of said pipeline,
- carbon means for reacting with gaseous NF.sub.3 at a temperature of 300.degree. to 600.degree. C. to form CF.sub.4 and N.sub.2 gases, said carbon means for reacting comprising a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit, and
- a processed gas exhaust pipeline, said reactor unit being constructed so as to be opened and closed for mounting and dismounting of said honeycomb structure,
- wherein said honeycomb structure is tapered such that said through openings have decreasing diameters in the direction of flow of the NF.sub.3 gas.
2 more elements
An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas;
- a reactor unit having an axis and communicating with one end of said pipeline;
- a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit;
- and
- a processed gas exhaust pipeline, said reactor unit having a circumferential side wall defining said axis and a door in the circumferential side wall of the reactor for opening and closing so as to allow the replacement of said honeycomb structure;
- wherein said honeycomb structure is tapered such that said through openings have decreasing diameters in the direction of flow of the NF.sub.3 gas.
3 more elements
An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas,
- a reactor unit having an axis and communicating with one end of said pipeline,
- carbon means for reacting with gaseous NF.sub.3 at a temperature of 300.degree. to 600.degree. C. to form CF.sub.4 and N.sub.2 gases, said carbon means for reacting comprising a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit, and
- a processed gas exhaust pipeline, said reactor unit being constructed so as to be opened and closed for mounting and dismounting of said honeycomb structure,
- wherein said honeycomb structure is constructed such that said through openings each have first and second portions, wherein each said first portion has a diameter which is greater than and is disposed upstream from a respective said second portion, and a restricted portion is disposed between each said first and second portions.
2 more elements
An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas;
- a reactor unit having an axis and communicating with one end of said pipeline;
- a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit;
- and
- a processed gas exhaust pipeline, said reactor unit having a circumferential side wall defining said axis and a door in the circumferential side wall of the reactor for opening and closing so as to allow the replacement of said honeycomb structure;
- wherein said honeycomb structure is constructed such that said through openings each have first and second portions, wherein each said first portion has a diameter which is greater than and is disposed upstream from a respective said second portion, and a restricted portion is disposed between each said first and second portions.
3 more elements
Dependencies are inferred from the claim text.