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US 5,401,298 AGranted
Sorption pump
AssigneeLeybold Inficon, Inc.
InventorGunter Voss
Life of this patent
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Abstract
A sorption pump for high vacuum applications that is suited for use in gas analyzers such as mass spectrometers. The pump includes a housing containing a quantity of getter material and a diffusion barrier in the gas inlet to the housing. A finite period of time is required for gas molecules in the vacuum analyzer system to cross the barrier, thus providing a window during which gas pulses can be accurately analyzed.
Claims8
A sorption pump for use in high vacuum applications, comprising:
- a vessel having an operating vacuum maintained therein, containing a quantity of gas molecules, and said vessel having an opening;
- an enclosed pump housing containing a quantity of sorption material, said housing having an inlet;
- connecting means for attaching said housing to said opening of said vessel in gaseous communication therewith through said inlet;
- and
- diffusion means disposed in said inlet for diffusion of said gas molecules therethrough during a finite period of time;
- whereby said gas molecules pass through the inlet and come into contact with said sorption material for capture thereby.
3 more elements
Dependencies are inferred from the claim text.