Environmental control system
AssigneeIntelligent Enclosures Corporation
InventorsGreg A. Marvell, Robert M. Genco, Gregory K. Mundt, Michael B. Tanaka
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AssigneeIntelligent Enclosures Corporation
InventorsGreg A. Marvell, Robert M. Genco, Gregory K. Mundt, Michael B. Tanaka
Estimating the term…
An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.
A modular system including a chamber having an input/output section, for enclosing a work piece and isolating it from the remainder of the room in which the chamber is located, comprising:
A transport system including a frame having an interior and adapted to be connected to a modular chamber for enclosing a work piece and isolating it from the remainder of the room in which the transport system and chamber are located, comprising:
A modular chamber with an upper section for enclosing a work piece and isolating it from the remainder of the room in which the chamber is located, comprising:
A product transport system for use in combination with a modular environmental control system, the combination comprising:
Dependencies are inferred from the claim text.