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US 5,400,210 AGranted
Substrate having a built-in capacitor and process for producing the same
AssigneeNgk Spark Plug Co., Ltd.
InventorsNoriyasu Sugimoto, Yukihiro Kimura, Masaharu Seto
Life of this patent
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Abstract
In a substrate having built-in capacitor which is incorporated in and united with an insulator, the capacitor has a dielectric layer made of a silicon nitride-based ceramic containing silicon carbide in an amount of from 13 to 30% by weight.
Claims9
A substrate comprising a built-in capacitor incorporated in and united with an insulator, said capacitor comprising a dielectric layer made of a silicon nitride-based ceramic containing silicon carbide in an amount of from 13 to 30% by weight.
A process for producing a substrate comprising a built-in capacitor which comprises the steps of:
- (a) forming an insulator sheet comprising an insulating ceramic;
- (b) preparing a mixture containing from 13 to 30% by weight of silicon carbide, with the remainder comprising silicon nitride and a sintering aid, and forming the mixture into a dielectric sheet;
- (c) printing an electrode pattern on at least either of the insulator sheet and the dielectric sheet using a metallizing ink;
- and
- (d) subsequently piling up at least one such insulator sheet and at least one such dielectric sheet and burning the assemblage to unite the sheets together.
2 more elements
Dependencies are inferred from the claim text.