US 5,400,143 A · Compact laser interferometer system

Abstract

An optical interferometer system is described which precisely measures the angle of rotation of a mirrored surface about a desired axis of rotation without sensitivity to rotation of the surface about an axis perpendicular to the desired axis of measurement. Measurements of the angle or position of a surface are made without attaching any optical or other components to the surface. In operation, a laser beam is passed through a beam splitter which provides two secondary beams. Each of the beams is then passed through a respective optical assembly, each of which is essentially a mirror image of the other. Each of the optical assemblies comprises a unique combination and arrangement of optics which provides a folded optical path wherein the laser beam passes through the system optics and is reflected multiple times by the mirror being measured. Each of the beams then passes back through its respective optical section and is detected by optical means. Each section of the optical assembly includes a "mid-path assembly" comprising a penta-prism/right-angle prism optically coupled to a retro-reflector. This mid-path assembly cancels out the effects of any off-axis movement of the surface being measured and provides accurate measurements even when the surface is rotated orthogonally to the plane of rotation of the desired measurement.

Claims32

Dependent claims

An interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said interferometer system comprising:

(a) means for splitting a polarized input light beam into two secondary beams, each of which functions as a measurement beam;
(b) a first optical assembly optically coupled to said splitting means for receiving a first one of said two secondary beams to produce a first output beam;
(c) a second optical assembly optically coupled to said splitting means for receiving the other one of said two secondary beams to produce a second output beam;
(d) wherein said first optical assembly and said second optical assembly each includes:
(1) transmitting/reflecting means for transmitting said measurement beam incident thereon from a first direction and for reflecting said measurement beam incident thereon from a second direction, wherein said first direction and said second direction are mutually perpendicular;
(2) mid-path assembly means optically coupled to said transmitting/reflecting means, for canceling out translation of said measurement beam;
(3) retro-reflector means optically coupled to said transmitting/reflecting means for providing a reflected said measurement beam which is parallel to and displaced from an incident said measurement beam;
and
(e) beam mixer means optically coupled to said first output beam and to said second output beam for generating interference fringes for determining said angle by receiving said first output beam and said second output beam.

6 more elements

An interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said interferometer system comprising:

(a) means for splitting a polarized input light beam into two secondary beams, each of which functions as a measurement beam;
(b) a first optical assembly optically coupled to said splitting means for receiving a first one of said two secondary beams to produce a first output beam;
(c) a second optical assembly optically coupled to said splitting means for receiving the other one of said two secondary beams to produce a second output beam;
(d) wherein said first optical assembly and said second optical assembly each includes:
(1) first, second, third and fourth transmitting/reflecting means, each of which operates independently for transmitting said measurement beam incident thereon from a first direction and for reflecting said measurement beam incident thereon from a second direction, wherein said first direction and said second direction are mutually perpendicular;
(2) mid-path assembly means optically coupled between said second and third transmitting/reflecting means, including a penta-prism and a right angle prism in combination, for canceling out translation of said measurement beam;
(3) a retro-reflector optically coupled to said first, second, third and fourth transmitting/reflecting means for providing a reflected said measurement beam which is parallel to and displaced from an incident said measurement beam;
and
(e) beam mixer means optically coupled to said first output beam and to said second output beam for generating interference fringes for determining said angle by receiving said first output beam and said second output beam.

6 more elements

An interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said interferometer system comprising:

(a) means for splitting a polarized input light beam into two secondary beams;
(b) a pair of optical assemblies optically coupled to said splitting means, each of said optical assemblies being operative with one of said two secondary beams to provide a measurement beam, each of said pair of optical assemblies further comprising:
(1) transmitting/reflecting means for transmitting said measurement beam incident thereon from a first direction and for reflecting said measurement beam incident thereon from a second direction, wherein said first and said second directions are mutually perpendicular;
(2) mid-path assembly means optically coupled to said transmitting/reflecting means, including a penta-prism and a right angle prism in combination, for canceling out any translation of said measurement beam;
(3) a retro-reflector optically coupled to said transmitting/reflecting means for providing a reflected said measurement beam which is parallel to and displaced from an incident said measurement beam;
(4) wherein said measurement beam enters one of said pair of optical assemblies via said transmitting/reflecting means;
(5) wherein said measurement beam is reflected from said measurement surface a first time after being reflected by said transmitting/reflecting means;
(6) wherein said measurement beam is reflected from said retro-reflector and then reflected by said transmitting/reflecting means to be reflected from said measurement surface a second time;
(7) wherein said measurement beam is transmitted through said mid-path assembly and then reflected by said transmitting/reflecting means to be reflected from said measurement surface a third time;
(8) wherein said measurement beam is reflected from said retro-reflector and then transmitted through said transmitting/reflecting means to be reflected from said measurement surface a fourth time to provide an output beam;
(d) wherein each one of said pair of optical assemblies is operative with a different one of said two secondary beams;
and
(e) beam mixer means optically coupled to said output beam for generating interference information for determining said angle by intersecting said two secondary beams after having been operated upon by said pair of optical assemblies.

10 more elements

An interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said interferometer system comprising:

(a) beam splitter means for splitting a polarized input light beam into two secondary beams, each of which functions as a measurement beam;
(b) a first optical assembly optically coupled to said splitting means for receiving a first one of said two secondary beams to produce a first output beam;
(c) a second optical assembly optically coupled to said splitting means for receiving the other one of said two secondary beams to produce a second output beam;
(d) wherein said first optical assembly and said second optical assembly each includes:
(1) mid-path assembly means optically coupled to said beam splitter means for canceling out translation of said measurement beam;
(2) retro-reflector means optically coupled to said mid-path assembly means, and attached to said measurement surface, for providing a reflected said measurement beam which is parallel to and displaced from an incident said measurement beam;
and
(3) right angle beam turning prism means optically coupled between said mid-path assembly means and said retro-reflector means for reflecting incident light at a right angle;
and
(e) beam mixer means optically coupled to said first output beam and to said second output beam for generating interference fringes for determining said angle by intersecting said first output beam and said second output beam.

7 more elements

A laser interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said system comprising:

(a) initial splitting means for splitting a laser input beam into two secondary beams;
(b) output beam splitter means for causing two intersected said secondary beams to generate interference information for calculating said angle;
(c) a pair of optical assemblies, each of which is optically coupled to said initial splitting means and which further comprises:
a first, a second, a third, and a fourth polarizing beam splitter, each of which is operable independently to transmit light which polarized in a first orientation and reflect light which is polarized in a second orientation perpendicular to said first orientation;
first, second, third, fourth, and fifth polarization means, each of which is operable independently to polarize light passing therethrough;
a penta-prism optically coupled to a right angle prism;
and
a retro-reflector;
(d) wherein the polarization imparted by said fifth polarization means in a first one of said pair of optical assemblies is substantially different from the polarization imparted by said fifth polarization means in the second one of said pair of optical assemblies;
(e) wherein each one of said pair of optical assemblies is operative with a different one of said two secondary beams;
and
(f) wherein each one of said two secondary beams travels through a corresponding one of said pair of optical assemblies from said first polarizing beam splitter through said first polarization means to said measurement surface and back through said first polarization means and is then reflected by said first polarizing beam splitter toward said retro-reflector, is reflected therefrom through said second polarizing beam splitter and through said second polarization means to said measurement surface and back through said second polarization means and is then reflected by said second polarizing beam splitter toward and through said penta-prism and through said right angle prism, and then is reflected by said third polarizing beam splitter through said third polarization means to said measurement surface and back through said third polarization means and then passes through said third polarizing beam splitter toward said retro-reflector, is reflected therefrom through said fourth polarizing beam splitter and through said fourth polarization means to said measurement surface and back through said fourth polarization means and then reflected by said fourth polarizing beam splitter toward and through said fifth polarization means into said output beam splitter means,

9 more elements

A laser interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said system comprising:

(a) means for splitting a linearly polarized laser input beam into two linearly polarized secondary beams;
(b) a pair of optical assemblies, each of which is optically coupled to said initial splitting means and which further comprises:
a first, a second, a third, and a fourth polarizing beam splitter, each of which is operable independently to transmit light which polarized in a first orientation and reflect light which is polarized in a second orientation perpendicular to said first orientation;
first, second, third, fourth, and fifth polarization means, each of which is operable independently to polarize light passing therethrough;
a penta-prism optically coupled to a right angle prism;
a retro-reflector;
a penta-prism optically coupled to a right angle prism;
wherein said first polarizing beam splitter reflects one of said two linearly polarized secondary beams towards said measurement surface to create a measurement beam;
wherein said first polarization means is optically coupled between said first polarizing beam splitter and said measurement surface;
wherein said measurement beam is transmitted through said first polarization means toward said measurement surface;
wherein said measurement beam is reflected from said measurement surface;
wherein said measurement beam is transmitted back through said first polarization means;
wherein said measurement beam is transmitted through said first polarizing beam splitter toward said retro-reflector;
wherein said measurement beam is reflected by said retro-reflector;
wherein said measurement beam is transmitted through said second polarizing beam splitter and second polarization means toward said measurement surface and back to said second polarizing beam splitter;
wherein said second polarizing beam splitter reflects said measurement beam towards said penta-prism and through said penta-prism and said right angle prism;
wherein said measurement beam is reflected by said third polarizing beam splitter through said third polarization means to said measurement surface and back through said third polarization means;
wherein said measurement beam passes through said third polarizing beam splitter toward said retro-reflector and is reflected towards said fourth polarizing beam splitter;
wherein said measurement beam is transmitted through said fourth polarization means toward said measurement surface and reflected back through said fourth polarization means;
wherein said measurement beam is reflected by said fourth polarizing beam splitter toward and through said fifth polarization means into said output beam splitter means;
(c) wherein said fifth polarization means in a first one of said pair of optical assemblies imparts a first polarization to a first said measurement beam and said fifth polarization means in the second one of said pair of optical assemblies imparts a second polarization to a second said measurement beam;
(d) wherein each one of said pair of optical assemblies is operative with a different one of said two linearly polarized secondary beams;
and
(e) output beam splitter means for generating interference information by intersecting said first measurement beam and said second measurement beam.

21 more elements

An interferometer system for differentially measuring an angle between a reference plane and a measurement surface, said interferometer system comprising:

(a) means for splitting a polarized input light beam into two secondary beams;
(b) a pair of optical assemblies, each of which is optically coupled to one of said two secondary beams to provide a measurement beam, each of said pair of optical assemblies further comprising:
(1) four transmitting/reflecting means, each of which operates independently for transmitting said measurement beam incident thereon from a first direction and for reflecting said measurement beam incident thereon from a second direction, wherein said first and said second directions are mutually perpendicular;
(2) mid-path assembly means optically coupled to each of said transmitting/reflecting means, including a penta-prism and a right angle prism in combination, for canceling out any translation of said measurement beam;
(3) a retro-reflector optically coupled to each of said transmitting/reflecting means;
(4) wherein said measurement beam enters one of said pair of optical assemblies via a first one of said transmitting/reflecting means;
(5) wherein said measurement beam is reflected from said measurement surface a first time after being reflected by said first one of said transmitting/reflecting means;
(6) wherein said measurement beam is reflected from said retro-reflector and then reflected by a second one of said transmitting/reflecting means to be reflected from said measurement surface a second time;
(7) wherein said measurement beam is transmitted through said mid-path assembly and then reflected by a third one of said transmitting/reflecting means to be reflected from said measurement surface a third time;
(8) wherein said measurement beam is reflected from said retro-reflector and then transmitted through a fourth one of said transmitting/reflecting means to be reflected from said measurement surface a fourth time to provide an output beam;
(d) wherein each one of said pair of optical assemblies is operative with a different one of said two secondary beams;
and
(e) beam mixer means operative with said output beam for generating interference information for determining said angle by intersecting said two secondary beams after having been operated upon by said pair of optical assemblies.

10 more elements

Dependencies are inferred from the claim text.

Compact laser interferometer system

Life of this patent

Compact laser interferometer system

Life of this patent

Abstract

Claims32