Automatic defect inspection apparatus for color filter
AssigneeNikon Corporation
InventorIchiro Maeda
Life of this patent
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Abstract
An automatic defect inspection apparatus for a color filter includes a light source for radiating light onto a color filter having a spatially periodical repetitive structure of red, green, and blue, a detector for detecting light from the color filter, and a processor for executing arithmetic processing of the output signal from the detector. In the apparatus, the detector is arranged to detect the light radiated form the light source and transmitted through the color filter, and a diaphragm for limiting the area of the transmitted light incident on the detector in association with an integer multiple of the spatially periodical repetitive structure of red, green, and blue is arranged.
Claims17
An automatic defect inspection apparatus for a color filter having a structure in which red, green, and blue areas are continuously, periodically, and repetitively arranged along a predetermined direction, comprising:
- light source means for radiating light toward said color filter;
- detection means for detecting light radiated from said light source means and transmitted through a predetermined area of said color filter, said predetermined area being set, so that areas of the red, blue, and green areas of said color filter are substantially equal to each other;
- limiting means, arranged between said light source means and said detection means to determine said predetermined area of said color filter, for shielding some light components from said light source means;
- and
- processing means for performing arithmetic processing of an output signal from said detection means.
An automatic defect inspection apparatus for a color filter having a structure in which red, green, and blue areas are continuously, periodically, and repetitively arranged along a predetermined direction, comprising:
- light source means for radiating light toward said color filter;
- first detection means for detecting light radiated from said light source means and transmitted through a first area on said color filter;
- second detection means for detecting light radiated from said light source means and transmitted through a second area on said color filter, said first and second areas having the same shape;
- first limiting means, arranged between said light source means and said first detection means to determine said first area of said color filter, for shielding some light components from said light source means;
- second limiting means, arranged between said light source means and said second detection means to determine said second area of said color filter, for shielding some light components from said light source means;
- and
- processing means for executing arithmetic processing of output signals from said first and second detection means, said processing means calculating a difference between signals from said first and second detection means.
Dependencies are inferred from the claim text.