Photo-shield structure of charge-coupled device
AssigneeNEC Corporation
InventorYasutaka Nakashiba
Life of this patent
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Abstract
A charge-coupled device has a metal wiring which serves both as a wiring for supplying a predetermined potential to charge transfer electrodes constituting a vertical charge transfer section and as a photo-shield for the vertical charge transfer section. The metal wiring is formed from a metal film, a refractory metal film or its silicides. The device has a photoelectric conversion section arranged in a two dimensional form and having a vertical bordering region at which the width of the metal wiring is wider than that of other regions. It is possible to suppress the generation of the false signal caused by smear phenomena without suffering from the lowering of the sensitivity of the device.
Claims5
A charge-coupled device having a plurality of picture elements, said charge-coupled device comprising:
- a plurality of first and second charge transfer electrodes constituting a plurality of vertical charge transfer sections;
- a plurality of photoelectric conversion sections each defined by said first and second charge transfer electrodes in a two dimensional form;
- and
- a plurality of metal wirings serving both as a plurality of wirings for supplying a plurality of different drive pulses to said plurality of first and second charge transfer electrodes, respectively, and as photo-shields for said plurality of vertical charge transfer sections, each of said metal wirings being formed from a metal film, a refractory metal film or its silicides, and each of said metal wirings having a predetermined width which is increased in width at a vertical border region formed by said first and second charge transfer electrodes between adjacent picture elements.
Dependencies are inferred from the claim text.