Method for manufacturing a multiple walled capacitor of a semiconductor device

A method of manufacturing a capacitor electrode of a semiconductor device comprising the steps of:

• (a) forming a conductive layer on a semiconductor substrate;
• (b) forming a first material mask pattern on said conductive layer for defining individual cell units;
• (c) sequentially forming a first spacer on a sidewall of said first material mask pattern then forming a second spacer on a sidewall of said first spacer;
• (d) anisotropically etching said conductive layer using said first material mask pattern and said first and second spacers as etching masks, thereby forming a first conductive pattern defined into individual cell units;
• (e) removing said first material mask pattern and said second spacer;
• (f) forming an inner spacer on an inner sidewall of said first spacer and an outer spacer on an outer sidewall of said first spacer;
• and
• (g) anisotropically partially etching said individual cell units of said first conductive pattern using said inner spacer and said outer spacer as said inner and outer etching masks, respectively, to obtain a first electrode of a semiconductor device.

A method of manufacturing a capacitor of a semiconductor device comprising the steps of:

• (a) forming a conductive layer on a semiconductor substrate;
• (b) forming a first material layer on said conductive layer;
• (c) forming a plurality of composite patterns on said first material layer, each said composite pattern being comprised of a third material layer stacked atop a second material layer, each said composite pattern defining an individual, spatially separated, cell unit;
• (d) forming a plurality of first spacers, each of which peripherally surrounds each of said composite mask patterns;
• (e) anisotropically etching said first material layer using said first spacers and said third material layers of said composite mask patterns as etching masks to form a first material pattern;
• (f) removing said first spacers and said third material layers from each said composite mask pattern;
• (g) forming a plurality of second spacers, each second spacer concentrically surrounding one of said first material patterns and spatially separated from adjacent second spacers, thereby leaving exposed a portion of said conductive layer between adjacent second spacers, and a plurality of third spacers, each third spacer concentrically surrounding one of said second material layers and leaving exposed an outer portion of said first material pattern;
• (h) simultaneously etching back each of said second material layers and etching said conductive layer to thereby provide a conductive pattern with a groove;
• and
• (i) anisotropically etching said first material pattern and an upper portion of each of said conductive patterns using said second and third spacers as etching masks, thereby resulting in a double-walled electrode of a capacitor.

A method of manufacturing a semiconductor memory device comprising the steps of:

• (a) forming a conductive layer on a semiconductor substrate;
• (b) forming a plurality of composite mask patterns on said conductive layer, each said composite mask pattern being comprised of a second material layer stacked on a first material layer, thereby defining a plurality of spatially separated individual cell units;
• (c) forming a third material layer over the entire structure obtained after step (b), said third material layer having a recessed portion between adjacent composite mask patterns;
• (d) forming a plurality of first spacers, each first spacer formed on a sidewall of said recessed portion of said third material layer and thus concentrically surrounding one of said composite mask patterns;
• (e) anisotropically etching said third material layer using each of said first spacers as an etching mask to thereby form a third material mask pattern and exposing each of said composite mask patterns;
• (f) removing said first spacers and each of said second material mask patterns;
• (g) forming a plurality of second spacers concentrically surrounding an outer sidewall of each of said third material mask patterns and a plurality of fourth material mask patterns between each of said third material mask patterns and said first material mask patterns;
• (h) etching an upper portion of each of said conductive layers using said second spacers, said fourth material mask patterns, said third material mask patterns, and said first material mask layers as etching masks to form a conductive pattern with a groove;
• (i) removing said first material mask layers and said third material mask patterns;
• and
• (j) anisotropically etching said conductive pattern using said second spacers and said fourth material mask patterns as outer and inner etch masks, respectively.