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US 5,399,456 AGranted
Image reversal negative working photoresist containing O-quinone diazide and cross-linking compound
AssigneeHoechst Celanese Corporation
InventorsMark A. Spak, Donald Mammato, Dana Durham, Sangya Jain
Life of this patent
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Abstract
A process for converting a normally positive working photosensitive composition to a negative working composition. One forms a composition containing an alkali soluble resin, a 1,2 quinone diazide-4-sulfonyl compound and an acid catalyzed crosslinker in a solvent mixture. After drying and imagewise exposing, the composition is baked and developed to produce a negative image.
Claims11
A photographic composition which consists essentially of
- i) from about 1% to about 25% based on the weight of the solid parts of the composition of a photosensitive compound having the formula ##STR15## wherein R.sub.1 =1,2 benzoquinone-2-diazide-4-sulfonyl;
- 1,2 naphthoquinone-2-diazide-4-sulfonyl;
- or 1,2 anthraquinone-2-diazide-4-sulfonyl
- R.sub.2 =H, R.sub.7, OR.sub.6 or ##STR16## R.sub.3 =H, R.sub.7, OR.sub.6 or ##STR17## R.sub.4 =H, R.sub.7, OR.sub.6 or ##STR18## R.sub.6 =H, alkyl, aryl aralkyl or R.sub.1 R.sub.7 =alkyl, aryl or aralkyl
- ii) from about 75% to about 99% based on the weight of the solid parts of the composition of a novolak or polyvinyl phenol resin;
- and
- iii) from about 0.5% to about 20% based on the weight of the solid parts of the composition of a crosslinking compound which has the formula
- (R.sub.1 O--CHR.sub.3).sub.n --A--(CHR.sub.4 --OR.sub.2).sub.m
- wherein A has the formula B or B--Y--B, wherein B is a substituted or unsubstituted mononuclear or fused polynuclear aromatic hydrocarbon or a oxygen or sulfur containing heterocyclic compound, Y is a single bond, C.sub.1 -C.sub.4 -alkylene or -alkylenedioxy, the chains of which may be interrupted by --O--, --S--, --SO.sub.2 --, --CO--, CO.sub.2, --O--CO.sub.2 --, --CONH-- or phenylenedioxy, R.sub.1 and R.sub.2 are H, C.sub.1 -C.sub.6 -alkyl, cycloalkyl, substituted or unsubstituted aryl, alkaryl or acyl;
- R.sub.3, R.sub.4 are independently H, C.sub.1 -C.sub.4 -alkyl or substituted or unsubstituted phenyl and n ranges from 1 to 3 and m ranges from 0-3, provided that n+m is greater than 1;
- and
- iv) sufficient solvent to dissolve the foregoing composition components.
9 more elements
Dependencies are inferred from the claim text.