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US 5,399,435 AGranted
Amorphous oxide film and article having such film thereon
AssigneeAsahi Glass Company, Limited
InventorsEiichi Ando, Koichi Suzuki, Junichi Ebisawa, Susumu Suzuki
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Abstract
An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
Claims7
An article with high durability, which comprises a glass substrate and an amorphous oxide film consisting essentially of an oxide containing Zr and Si (ZrSi.sub.z O.sub.y), wherein the atomic ratio z of Si to Zr is 0.05.ltoreq.z<19, and the atomic ratio y of O to Zr is 2.1.ltoreq.y<40.
Dependencies are inferred from the claim text.