Process of manufacturing carbon fibers with high chemical stability

A process of manufacturing carbon fibers of high chemical stability which comprises reacting starting carbon fibers with a compound capable of forming a heat-resistant carbide ceramic on said carbon fibers, said compound being selected from the group consisting of silicon halide, zirconium halide, titanium halide, hafnium halide, boron halide, niobium halide, tungsten halide, silicon hydride, zirconium hydride, titanium hydride, hafnium hydride, boron hydride, niobium hydride and tungsten hydride, the carbide forming reaction being effected at 800.degree. C.-1,700.degree. C., at 0.1-760 mmHg and in the presence of hydrogen in an amount of 0.1-5 times the amount of said compound, so as to form a carbide ceramic at the surface portion alone of said carbon fibers or together with part of an inner layer of said carbon fibers, and thereafter thermally treating said carbon fibers at 1,000.degree. C.-3,000.degree. C. in a gas atmosphere selected from the group consisting of N.sub.2, NH.sub.3, He, Ne, Ar, Kr, Xe and Rn.