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US 5,399,252 AGranted
Apparatus for coating a substrate by magnetron sputtering
AssigneeLeybold Aktiengesellschaft
InventorsMichael Scherer, Wolfram Maass, Joachim Szczyrbowski
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Abstract
A pair of magnetron cathodes in an evacuable coating chamber are connected to the outputs of the secondary winding of a transformer, the primary winding being connected to the outputs of a medium frequency A.C. generator. An oval target is mounted on each cathode and surrounded by stainless steel bars. As an alternative the bars may be configured as plates connected to ground and mounted to the target by insulating spacers.
Claims10
Apparatus for coating a substrate by magnetron sputtering, comprising
- an evacuable coating chamber,
- at least one magnetron cathode in said coating chamber,
- a target associated with each said at least one cathode, said target comprising an oval ring of material to be sputtered,
- bar means of stainless steel including outer bar means surrounding said oval ring and inner bar means located centrally of said oval ring, and
- insulating means between said bar means and said cathode, said bar means comprising stainless steel plates fixed to said insulating means, said stainless steel plates being electrically grounded.
2 more elements
Apparatus for coating a substrate by magnetron sputtering, comprising
- an evacuable coating chamber,
- at least one magnetron cathode in said coating chamber,
- a target associated with each said at least one cathode, said target comprising an oval ring of material to be sputtered,
- stainless steel plate means including outer stainless steel plate means surrounding said target and inner stainless steel plate means located centrally of said oval ring, said stainless steel plate means being exposed in a direction facing away from said cathode, and
- electrical insulating means located between said stainless steel plate means and said cathode.
2 more elements
Dependencies are inferred from the claim text.