Method of making field emission tips using physical vapor deposition of random nuclei as etch mask
AssigneesMicroelectronics and Computer Technology Corporation, SI Diamond Technology, Inc.
InventorNalin Kumar
Life of this patent
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Abstract
A method of making sub-micron low work function field emission tips without using photolithography. The method includes physical vapor deposition of randomly located discrete nuclei to form a discontinuous etch mask. In one embodiment an etch is applied to low work function material covered by randomly located nuclei to form emission tips in the low work function material. In another embodiment an etch is applied to base material covered by randomly located nuclei to form tips in the base material which are then coated with low work function material to form emission tips. Diamond is the preferred low work function material.
Claims23
A method of making field emission tips, comprising the following steps:
- disposing a continuous layer of a low work function material over a substrate;
- depositing in situ by physical vapor deposition a non-polymerized randomly patterned etch mask with a relatively high melting point over the low work function material, said etch mask consisting essentially of randomly located discrete nuclei with discontinuities therebetween formed as deposition occurs without coalescence of the nuclei thereby exposing portions of the low work function material beneath the discontinuities;
- etching the exposed portions of the low work function material;
- and
- removing the etch mask thereby forming exposed emission tips of low work function material.
A method of making field emission tips, comprising the following steps:
- disposing a continuous layer of a base material over a substrate;
- depositing in situ by physical vapor deposition a non-polymerized randomly patterned etch mask with a relatively high melting point over the base material, said etch mask consisting essentially of randomly located discrete nuclei with discontinuities therebetween formed as deposition occurs without coalescence of the nuclei thereby exposing portions of the base material beneath the discontinuities;
- etching the exposed portions of the base material to form tips in the base material;
- and
- depositing a low work function material over the tips in the base material thereby forming exposed emission tips of low work function material.
A method of making diamond emission tips without photolithography, comprising the following steps:
- providing a substrate;
- depositing a continuous layer of a diamond on the substrate;
- depositing in situ by evaporation or sputtering a non-polymerized randomly patterned etch mask with a relatively high melting point on the diamond, said etch mask consisting essentially of randomly located discrete nuclei with discontinuities therebetween formed as deposition occurs without coalescence of the nuclei thereby exposing portions of the diamond beneath the discontinuities while covering other portions of the diamond beneath the nuclei;
- etching the exposed portions of the diamond by applying an ion etch after the deposition of nuclei begins, wherein the diamond etches at a greater rate than the etch mask so as to form valleys in the diamond with diamond emission tips therebetween;
- and
- removing all of the etch mask thereby exposing the diamond emission tips.
A method of making diamond emission tips without photolithography, comprising the following steps:
- providing a substrate;
- depositing a continuous layer of a base material on the substrate;
- depositing in situ by evaporation or sputtering a non-polymerized randomly patterned etch mask with a relatively high melting point on the base material, said etch mask consisting essentially of randomly located discrete nuclei with discontinuities therebetween formed as deposition occurs without coalescence of the nuclei thereby exposing portions of the base material beneath the discontinuities while covering other portions of the base material beneath the nuclei;
- etching the exposed portions of the base material by applying an ion etch after the deposition of nuclei begins, wherein the base material etches at a greater rate than the etch mask so as to form valleys in the base material with base tips between the valleys;
- and then
- depositing diamond over the base material thereby forming exposed diamond emission tips between the valleys.
Dependencies are inferred from the claim text.