Apparatus for gas source molecular beam epitaxy
AssigneeDaidousanso Co., Ltd.
InventorsHiromi Kiyama, Kenji Okumura, Hidehiko Oku
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Abstract
This invention relates to an apparatus wherein a vacuum chamber is divided into two spaces, the substrate heating space and the crystal growth space, so that the degree of vacuum in the substrate heating space is set lower than the pressure for the Si growth and the degree of vacuum in the crystal space is set corresponding to the pressure for Si growth to thereby grow Si based semiconductor with excellent reproducibility over a long period. Moreover, heat efficiency toward the substrate is heightened by enclosing the upside and the circumference of the heating means with the heat shielding body to cut energy cost.
Claims1
An apparatus for gas source molecular beam epitaxy comprising:
- a vacuum chamber capable of being set at high vacuum;
- a substrate installed inside the vacuum chamber;
- means for heating the substrate by radiant heat from one side of the installed substrate;
- means for supplying gas for formation of a crystal film on the opposite side of the substrate;
- a separator set around the substrate which divides the interior of the vacuum chamber into two spaces, a first space for heating the substrate and a second space for crystal formation, wherein said separator includes an inner carbon part contacting said substrate and an outer quartz part contacting the inner wall of said vacuum chamber;
- and
- means for separate evacuation of said first and second spaces wherein, the evacuated pressure of said second space being lower than the evacuated pressure of said first space.
Dependencies are inferred from the claim text.