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US 5,398,549 AGranted
Flowmeter sensor
AssigneeMKS Japan, Inc.
InventorIsao Suzuki
Life of this patent
Estimating the term…
Abstract
A flowmeter sensor includes a sensor tube, and a heater/resistor through which the sensor tube passes. The heater/resistor includes a substantially cylindrical sleeve fitted around the sensor tube and made of ceramic. A thin film of platinum is deposited on the sleeve and is then partially removed by a laser to provide a helical resistance pattern. A pair of electrically conductive rings are tightly fitted around opposite ends of the ceramic sleeve and serve as bases to be connected with a corresponding pair of leads.
Claims6
A flowmeter sensor comprising:
- a substantially cylindrical sensor tube through which a fluid is to flow;
- a heater/resistor including at least one substantially cylindrical sleeve having opposite ends and fitted around said sensor tube and made of an electrically nonconductive material, and a heating element formed on each said at least one sleeve,
- said heating element including a thin film of electrically resistive material;
- and
- a pair of electrically conductive rings tightly fitted around the opposite ends of said sleeve, respectively, and electrically conductively connected to said film of resistive material.
2 more elements
Dependencies are inferred from the claim text.